Difference between revisions of "RIE Etching Recipes"

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(→‎RIE 5 (PlasmaTherm): added Photoressit & ARC etching, copied from DUV Litho recipes page)
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{{recipes|Dry Etching}}
 
{{recipes|Dry Etching}}
=[[RIE 1 (Custom)]] =
 
 
=[[RIE 2 (MRC)]] =
 
=[[RIE 2 (MRC)]] =
 
==CdZnTe Etching (RIE 2)==
 
==CdZnTe Etching (RIE 2)==

Revision as of 20:26, 16 September 2019