Difference between revisions of "RIE Etching Recipes"
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=[[RIE 5 (PlasmaTherm)]] = |
=[[RIE 5 (PlasmaTherm)]] = |
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| − | ==AlGaAs Etching (RIE 5)== |
+ | ==AlGaAs\GaAs Etching (RIE 5)== |
| − | *[[media:13-GaAs-AlGaAs_Etching-RIE-5.pdf|AlGaAs Etch Recipes - BCl<sub>3</sub>-SiCl<sub>4</sub>]] |
+ | *[[media:13-GaAs-AlGaAs_Etching-RIE-5.pdf|GaAs\AlGaAs Etch Recipes - BCl<sub>3</sub>-SiCl<sub>4</sub>]] |
==GaN Etching (RIE 5)== |
==GaN Etching (RIE 5)== |
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Revision as of 17:09, 23 October 2013
Back to Dry Etching Recipes.