Difference between revisions of "RIE Etching Recipes"
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==AlGaAs Etching (RIE 5)== |
==AlGaAs Etching (RIE 5)== |
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*[[media:|AlGaAs Etch Recipes]] |
*[[media:|AlGaAs Etch Recipes]] |
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| + | ==GaN Etching (RIE 5)== |
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| + | *[[media:08-Plasma_Etching_of_GaN-RIE5.pdf|GaN Etch Recipes]] |
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=AlGaAs Etching (RIE 5)== |
=AlGaAs Etching (RIE 5)== |
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Revision as of 11:25, 2 October 2013
Back to Dry Etching Recipes.
RIE 1 (Custom)
RIE 2 (MRC)
CdZnTe Etching (RIE 2)
RIE 3 (MRC)
RIE 5 (PlasmaTherm)
AlGaAs Etching (RIE 5)
- [[media:|AlGaAs Etch Recipes]]
GaN Etching (RIE 5)
AlGaAs Etching (RIE 5)=
- [[media:|AlGaAs Etch Recipes]]