Difference between revisions of "RIE Etching Recipes"
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=[[RIE 3 (MRC)]] = |
=[[RIE 3 (MRC)]] = |
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=[[RIE 5 (PlasmaTherm)]] = |
=[[RIE 5 (PlasmaTherm)]] = |
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| − | =AlGaAs Etching (RIE 5)== |
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| − | *[[media:|AlGaAs Etch Recipes]] |
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| − | ==GaN Etching (RIE 5)== |
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| − | *[[media:08-Plasma_Etching_of_GaN-RIE5.pdf|GaN Etch Recipes]] |
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=AlGaAs Etching (RIE 5)== |
=AlGaAs Etching (RIE 5)== |
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Revision as of 11:23, 2 October 2013
Back to Dry Etching Recipes.
RIE 1 (Custom)
RIE 2 (MRC)
CdZnTe Etching (RIE 2)
RIE 3 (MRC)
RIE 5 (PlasmaTherm)
AlGaAs Etching (RIE 5)=
- [[media:|AlGaAs Etch Recipes]]