Difference between revisions of "RIE Etching Recipes"
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=[[RIE 1 (Custom)]] = |
=[[RIE 1 (Custom)]] = |
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=[[RIE 2 (MRC)]] = |
=[[RIE 2 (MRC)]] = |
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| + | ==CdZnTe Etching (RIE 2)== |
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| + | *[[media:|CdZnTe Etch Recipes]] |
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| + | |||
=[[RIE 3 (MRC)]] = |
=[[RIE 3 (MRC)]] = |
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=[[RIE 5 (PlasmaTherm)]] = |
=[[RIE 5 (PlasmaTherm)]] = |
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Revision as of 11:16, 27 September 2013
Back to Dry Etching Recipes.
RIE 1 (Custom)
RIE 2 (MRC)
CdZnTe Etching (RIE 2)
- [[media:|CdZnTe Etch Recipes]]