Difference between revisions of "RIE Etching Recipes"
Jump to navigation
Jump to search
(Created page with "{{recipes}} =RIE 1 (Custom) = =RIE 2 (MRC) = =RIE 3 (MRC) = =RIE 5 (PlasmaTherm) = =Si Deep RIE (PlasmaTherm/Bosch Etch)=") |
|||
| Line 1: | Line 1: | ||
| − | {{recipes}} |
+ | {{recipes|Dry Etching}} |
=[[RIE 1 (Custom)]] = |
=[[RIE 1 (Custom)]] = |
||
=[[RIE 2 (MRC)]] = |
=[[RIE 2 (MRC)]] = |
||