Difference between revisions of "RIE Etching Recipes"
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=[[RIE 3 (MRC)]] = |
=[[RIE 3 (MRC)]] = |
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==SiO<sub>2</sub> Etching (RIE 3)== |
==SiO<sub>2</sub> Etching (RIE 3)== |
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| − | *[[media:|SiO<sub>2</sub> Etch Recipe with a very low surface damage - CHF<sub>3]] |
+ | *[[media:SiO2-Etch-Recipe-using-RIE-3-a.pdf|SiO<sub>2</sub> Etch Recipe with a very low surface damage - CHF<sub>3]] |
=[[RIE 5 (PlasmaTherm)]] = |
=[[RIE 5 (PlasmaTherm)]] = |
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Revision as of 11:35, 2 August 2016
Back to Dry Etching Recipes.