Difference between revisions of "Packaging Recipes"

Revision as of 09:12, 16 October 2018

Dicing Saw Recipes (ADT 7100)

Cutting Parameters

Material	Blade Type	Spindle Speed	Cut Speed

Blade Diam	Flange Diam.	Blade Exposure

Mounting/Unmounting Samples

The UV-Release Tape dispenser is most-often used for mounting sample for dicing.

The Tape Model installed is XYZXYZ. Data Sheet Here.

Procedure for mounting sample on UV-Release Tape
Full Release: 60 sec exposure
Partial Release for Shipping: 9 sec exposure

Surface Protection

Users most often use sacrificial photoresists to protect the surface from accumulating dicing dust. The static-buildup of dielectric films causes the dust to adhere strongly. Ensure that the PR thickness will adequately coat all your exposed topography (eg. use a ≥2µm thick PR for protecting 1.5-2.0µm tall etched features).

Choose a photoresist of appropriate thickness, and spin-coat it & soft-bake it according to a standard recipe. Contact Alignment PR Recipes Stepper PR Recipes

Perform your dicing
Strip the PR in Acetone and ISO & N2 dry

Wafer Bonder (Logitech WBS7)

This tool is used for bonding samples to Silicon carrier wafers with CrystalBond wax.

Wax Mounting Procedure, with Spin-On Crystalbond

Draft only - in progress.  -- Demis 2018-10-16

Mix a fresh squirt bottle of CrystalBond diluted with Acetone (see Don Freeborn for method).
- XYZ grams of crystalbond, mixed into
- XYZ mL of Acetone, in dedicated squirt bottle
- Shake/stir to completely dissolve the wax
Place 4-inch silicon carrier wafer on POLOS spinner in solvent bench, with non-vacuum 4-inch chuck installed.
Set up POLOS recipe
- Spin at XYZ rpm for XYZ sec.
Squirt wax solution onto wafer
I/O to spin.
Place carrier wafer on Logitech bonder surface
Place sample to be bonded on top
Place 110mm chemical filter paper on top
Close lid, secure lid clamp
Run recipe:
- XYZ °C
- XYZ seconds
- Vacuum etc.?

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 == [[Dicing Saw (ADT)|Dicing Saw Recipes (ADT 7100)]] ==
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 # Perform your dicing
 # Strip the PR in Acetone and ISO & N2 dry
+== [[Wafer Bonder (Logitech WBS7)]] ==
+This tool is used for bonding samples to Silicon carrier wafers with CrystalBond wax.
+=== Wax Mounting Procedure, with Spin-On Crystalbond ===
+ Draft only - in progress.  -- Demis 2018-10-16
+* Mix a fresh squirt bottle of CrystalBond diluted with Acetone (see [[Don Freeborn]] for method).
+** XYZ grams of crystalbond, mixed into
+** XYZ mL of Acetone, in dedicated squirt bottle
+** Shake/stir to completely dissolve the wax
+* Place 4-inch silicon carrier wafer on POLOS spinner in solvent bench, with non-vacuum 4-inch chuck installed.
+* Set up POLOS recipe
+** Spin at XYZ rpm for XYZ sec.
+* Squirt wax solution onto wafer
+* I/O to spin.
+* Place carrier wafer on Logitech bonder surface
+* Place sample to be bonded on top
+* Place 110mm chemical filter paper on top
+* Close lid, secure lid clamp
+* Run recipe:
+** XYZ °C
+** XYZ seconds
+** Vacuum etc.?