PECVD Recipes

Back to [[{{{1}}} Recipes]].

PECVD 1 (PlasmaTherm 790)

SiN deposition (PECVD #1)

• SiN Deposition Recipe
• SiN Deposition Particle Thickness Data

SiO₂ deposition (PECVD #1)

• SiO₂ Deposition Recipe
• SiO₂ Deposition Particle Thickness Data

PECVD 2 (Advanced Vacuum)

SiN deposition (PECVD #2)

• SiN Deposition Recipe
• SiN Deposition Particle Thickness Data

SiO₂ deposition (PECVD #2)

• SiO₂ Deposition Recipe
• SiO₂ Deposition Particle Thickness Data