PECVD Recipes

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Back to [[{{{1}}} Recipes]].

PECVD 1 (PlasmaTherm 790)

PECVD 2 (Advanced Vacuum)

ICP-PECVD (Unaxis VLR)

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=PECVD_Recipes&oldid=1162"

Recipes