Difference between revisions of "PECVD Recipes"
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− | {{recipes}} |
+ | {{recipes|Vacuum Deposition}} |
=[[PECVD 1 (PlasmaTherm 790)]]= |
=[[PECVD 1 (PlasmaTherm 790)]]= |
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== SiN deposition (PECVD #1) == |
== SiN deposition (PECVD #1) == |
Revision as of 06:27, 17 August 2012
Back to Vacuum Deposition Recipes.