Difference between revisions of "PECVD Recipes"
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=[[ICP-PECVD (Unaxis VLR)]]= |
=[[ICP-PECVD (Unaxis VLR)]]= |
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| + | == SiN deposition (Unaxis VLR) == |
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| + | *[[media:PECVD2-SiN-Recipe-5W-High-Stress.pdf|SiN Deposition Recipe (5W High Stress)]] |
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| + | *[[media:PECVD2-SiN-Recipe-50W-Medium-Stress.pdf|SiN Deposition Recipe (50W Medium Stress)]] |
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| + | *[[media:PECVD2-SiN-Recipe-120W-Low-Stress.pdf|SiN Deposition Recipe (120W Low Stress)]] |
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Revision as of 06:25, 17 August 2012
Back to [[{{{1}}} Recipes]].