Difference between revisions of "PECVD 2 (Advanced Vacuum)"

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|picture=PECVD2.jpg
 
|picture=PECVD2.jpg
 
|type = Vacuum Deposition
 
|type = Vacuum Deposition
|super= Mike Silva
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|super= Don Freeborn
|phone=(805)839-3918x219
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|phone=(805)839-7975
 
|location=Bay 2
 
|location=Bay 2
 
|email=silva@ece.ucsb.edu
 
|email=silva@ece.ucsb.edu
 
|description = Vision 310 Advanced Vacuum PECVD
 
|description = Vision 310 Advanced Vacuum PECVD
|manufacturer = Veeco
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|manufacturer = Plasma-Therm
 
|materials =  
 
|materials =  
 
|toolid=15
 
|toolid=15
 
}}  
 
}}  
= About =
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==About==
  
This open-load system is dedicated to PECVD of SiO<sub>2</sub>, SiN<sub>x</sub>, SiO<sub>x</sub>N<sub>y</sub>, and a-Si using Silane (2%SiH<sub>4</sub>, 98% He), N<sub>2</sub>O, NH<sub>3</sub>, and N<sub>2</sub> gases. The sample electrode has a 270mm diameter useable area, allowing for multiple 4” wafer depositions in a single run. Standard operating temperature is 300C, but can be user changed for temps ranging anywhere from 250 to 350C. The system is equipped with a dual generator, dual frequency option for growth of low-stress Nitride films.
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*'''Films/Gases''': This open-load system is dedicated to PECVD of '''SiO<sub>2</sub>, SiN<sub>x</sub>, SiO<sub>x</sub>N<sub>y</sub>, and a-Si''' using Silane (2%SiH<sub>4</sub>, 98% He), N<sub>2</sub>O, NH<sub>3</sub>, and N<sub>2</sub> gases.
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*'''Size''': The sample electrode has a 270mm diameter useable area, allowing for multiple 4” wafer depositions in a single run.
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*'''Temperature''': Standard operating temperature is 300C, but can be user changed for temps ranging anywhere from 250 to 350C.
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*'''Low-Stress Si<sub>3</sub>N<sub>4</sub>''': The system is equipped with a dual generator, dual frequency option for growth of Low-stress Nitride films.
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**The Low-Stress Si3N4 film recipe are tested approx. monthly, and kept within ±100MPa. Data can be found at Recipes (below) > [[PECVD Recipes#Historical Data 5|Low-Stress Nitride]].
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==See Also==
  
=See Also=
 
 
*[http://www.advanced-vacuum.se/Ny-sida-8.html Vision 310 Product Page]
 
*[http://www.advanced-vacuum.se/Ny-sida-8.html Vision 310 Product Page]
  
=Documentation=
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==Documentation==
*[[media:Advanced PECVD 2-Operating-Manual for Adv. PECVD 2.pdf|Operating Instruction Manual for Advanced PECVD 2]]
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*[[Advanced PECVD 2 Standard recipes.pdf|Advanced PECVD 2 Standard Recipes]]
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*[[Advanced PECVD 2 Data-particles, thickness, index.pdf|Advanced PECVD 2 Data-particles, thickness, index]]
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*[https://wiki.nanotech.ucsb.edu/w/images/2/2c/SOP_for_Advanced_Vacuum_PECVD.pdf Operating Instructions]
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*[[Wafer Coating Process Traveler]]
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*For particle counting method, see the [[Wafer scanning process traveler|Surfscan Scanning Procedure]]
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==Recipes & Historical Data==
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*Recipes can be found on the PECVD Recipes Page:
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**[[PECVD Recipes#PECVD 2 .28Advanced Vacuum.29|Recipes > Vacuum Deposition Recipes > PECVD Recipes > '''<u>PECVD 2 - Advanced Vacuum</u>''']]
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**Thin-Films recorded: SiO2, Si3N4 and Low-Stress Si3N4
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**''Historical (Process Control) Data is also shown here.''
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*A list of ''all available'' deposited films can be found on the Vacuum Deposition Recipes page:
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**[[Vacuum Deposition Recipes|Recipes > Vacuum Deposition Recipes]]

Latest revision as of 10:04, 4 November 2021

PECVD 2 (Advanced Vacuum)
PECVD2.jpg
Tool Type Vacuum Deposition
Location Bay 2
Supervisor Don Freeborn
Supervisor Phone (805) 893-7975
Supervisor E-Mail dfreeborn@ece.ucsb.edu
Description Vision 310 Advanced Vacuum PECVD
Manufacturer Plasma-Therm
Vacuum Deposition Recipes
Sign up for this tool


About

  • Films/Gases: This open-load system is dedicated to PECVD of SiO2, SiNx, SiOxNy, and a-Si using Silane (2%SiH4, 98% He), N2O, NH3, and N2 gases.
  • Size: The sample electrode has a 270mm diameter useable area, allowing for multiple 4” wafer depositions in a single run.
  • Temperature: Standard operating temperature is 300C, but can be user changed for temps ranging anywhere from 250 to 350C.
  • Low-Stress Si3N4: The system is equipped with a dual generator, dual frequency option for growth of Low-stress Nitride films.
    • The Low-Stress Si3N4 film recipe are tested approx. monthly, and kept within ±100MPa. Data can be found at Recipes (below) > Low-Stress Nitride.

See Also

Documentation

Recipes & Historical Data