PECVD1 Recipes
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PECVD 1 (PlasmaTherm 790)
SiN deposition (PECVD #1)
- SiN Standard Recipe
- SiN Data 2014
- SiN 1000A Thickness uniformity 2014
- LS SiN Recipe
- LS SiN Data 2014
- LS SiN 3000A Thickness uniformity 2014