PECVD1 Recipes
Revision as of 09:29, 16 April 2014 by Biljana (talk | contribs) (Created page with "=PECVD 1 (PlasmaTherm 790)= == SiN deposition (PECVD #1) == *SiN Standard Recipe *[[media:PECVD1 SIN Data-April 2014 SIN dat...")
PECVD 1 (PlasmaTherm 790)
SiN deposition (PECVD #1)
- SiN Standard Recipe
- SiN Data (Deposition rate, Refractive index, Stress, HF etch rate)
- SiN Data April 2014
- SiN 1000A Thickness uniformity 2014
- Low Stress Si3N4 - Variable Stress Recipes
- Low Stress Si3N4 - Variable Stress Plot
SiO2 deposition (PECVD #1)
- SiO2 Standard Recipe
- SiO2 Data (Deposition rate, Refractive Index, Stress, HF etch rate)
- SiO2 Data April 2014
- SiO2 1000A Thickness uniformity 2014