PECVD1 Recipes
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Contents
1
PECVD 1 (PlasmaTherm 790)
1.1
SiN deposition (PECVD #1)
1.2
SiO
2
deposition (PECVD #1)
1.3
Other recipes (PECVD#1)
PECVD 1 (PlasmaTherm 790)
SiN deposition (PECVD #1)
SiN Standard Recipe
SiN Data 2014
SiN 1000A Thickness uniformity 2014
LS SiN Recipe
LS SiN Data 2014
LS SiN 3000A Thickness uniformity 2014
SiO
2
deposition (PECVD #1)
SiO
2
Standard Recipe
SiO
2
Data 2014
SiO
2
1000A Thickness uniformity 2014
Other recipes (PECVD#1)
SiO
x
N
y
Recipe
SiO
x
N
y
Data 2014
SiO
x
N
y
3000A Thickness uniformity 2014
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