PECVD1 Recipes
Revision as of 10:00, 10 December 2014 by Biljana (talk | contribs) (→LS SiOxNy deposition (PECVD #1))
PECVD 1 (PlasmaTherm 790)
SiN deposition (PECVD #1)
SiO2 deposition (PECVD #1)
Other recipes (PECVD1)
- SiOxNy Recipe
- SiOxNy Data 2014
- SiOxNy 3000A Thickness uniformity 2014
- LS SiN Recipe
- LS SiN Data 2014
- LS SiN 3000A Thickness uniformity 2014