Difference between revisions of "PECVD1-SiN standard recipe.pdf"
Jump to navigation
Jump to search
(Created page with "=PECVD1-SiN Standard Recipe= [https://docs.google.com/spreadsheet/ccc?key=0AuBs1GfMrpnXcEdXanZQNko3X0lUcHhVUlNyYnVDUkE&usp=sharing IBD Calibrations Spreadsheet] - Records ...") |
|||
| Line 1: | Line 1: | ||
=[[PECVD1-SiN Standard Recipe]]= |
=[[PECVD1-SiN Standard Recipe]]= |
||
| + | [https://drive.google.com/?tab=mo&authuser=0#my-drive=sharing PECVD1-SIN Standard Recipe] |
||
| − | [https://docs.google.com/spreadsheet/ccc?key=0AuBs1GfMrpnXcEdXanZQNko3X0lUcHhVUlNyYnVDUkE&usp=sharing IBD Calibrations Spreadsheet] - Records of historical film depositions (rates, indices), Uniformity etc. |
||