Difference between revisions of "PECVD1-SIN Standard Recipe (PlasmaTherm 790)"
Jump to navigation
Jump to search
(Created page with " =PECVD 1 (PlasmaTherm 790)= https://docs.google.com/spreadsheet/ccc?key=0AuBs1GfMrpnXcEdXanZQNko3X0lUcHhVUlNyYnVDUkE&usp=sharing PECVD1-SiN Standard recipe=0") |
|||
| Line 1: | Line 1: | ||
=[[PECVD 1 (PlasmaTherm 790)]]= |
=[[PECVD 1 (PlasmaTherm 790)]]= |
||
| − | https://docs.google.com/spreadsheet/ccc?key=0AuBs1GfMrpnXcEdXanZQNko3X0lUcHhVUlNyYnVDUkE&usp=sharing PECVD1-SiN Standard |
+ | [https://docs.google.com/spreadsheet/ccc?key=0AuBs1GfMrpnXcEdXanZQNko3X0lUcHhVUlNyYnVDUkE&usp=sharing PECVD1-SiN Standard Recipe Spreadsheet] |