Difference between revisions of "PECVD1-(PlasmaTherm 790)"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
(Blanked the page)
 
(3 intermediate revisions by the same user not shown)
Line 1: Line 1:
 
 
[https://drive.google.com/file/d/0B3wBU1s4JQo2MTJDa0tkOTJrVGs/edit?usp=sharing PECVD1-SiN Standard Recipe]
 

Latest revision as of 14:59, 19 March 2014