Difference between revisions of "PECVD1-(PlasmaTherm 790)"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
Line 1: Line 1:
   
 
[https://drive.google.com/file/d/0B3wBU1s4JQo2eHJueXhsVXRKanc/edit?usp=sharing PECVD1-SiN Standard Recipe]
 
[https://drive.google.com/file/d/0B3wBU1s4JQo2MTJDa0tkOTJrVGs/edit?usp=sharing PECVD1-SiN Standard Recipe]
 

Revision as of 17:33, 18 March 2014