Oxygen Plasma System Recipes
Revision as of 15:25, 28 August 2018 by John d (talk | contribs) (→Ashers (Technics PEII): added SiN etch and chamber clean)
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Ashers (Technics PEII)
CF4/O2 PEii
SiN Etching
- Pressure = 300mT–350mT
- Power = 100W
- Etch Rate ≈ 50-100 nm/min. Varies.
Chamber Clean after CF4 Etching
- Pressure = 300mT–350mT
- Power = 300W
- Time = 10min
- Set power back to 100W before shutting off plasma!