Oxford ICP Etcher - Process Control Data

Data - InP Ridge Etch (Oxford ICP Etcher)

PECVD SiO2 hardmask, patterned on Stepper #2 (AutoStep 200) & Panasonic ICP #1

InP Ridge Etch: 60°C, 3mT, 800W/65W, Cl2=18, H2=15, CH4=10sccm, time=5min00sec (300sec) Silicon carrier, no adhesive. Sample Size: 1x1cm, ~30-40% SiO2 masking (NingC's pattern)
Date	Sample#	Etch Rate (nm/min)	Etch Selectivity (InP/SiO2)	Comments	SEM Images
1/26/22	NiravP

Dependence on Sample Size

We have found that the size of the InP piece loaded (no adhesive, onto Silicon carrier wafer) affects the etch rate, but does not affect the etch profile - ie. etches are still smooth and vertical, but rate varies with sample area.

InP Ridge Etch: 60°C, 3mT, 800W/65W, Cl2=18, H2=15, CH4=10sccm, time=5min05sec (305sec)
Date	Sample#	Sample Size (dimensions, mm)	Sample Size (area, mm2)	Etch Rate (nm/min)	Etch Selectivity (InP/SiO2)	Comments	SEM Images
1/11/22	DJ_InPRidge	4.5 x 2.5	11.25	0.602	64.6nm left		[1]
1/12/22	DJ_InPRidge	4.5 x 3	13.5	0.563	76.4nm left		[2]
1/12/22	DJ_InP#3	4.5 x 3	13.5	0.612	71nm left		[3]
1/26/22	NiravP	10 x 10	100
1/26/22	NiravP	1/4 of 50mm wafer	490