Oxford ICP Etcher - Process Control Data

From UCSB Nanofab Wiki
Revision as of 14:24, 13 January 2022 by John d (talk | contribs) (in progress InP Ridge Etch)
Jump to navigation Jump to search

Data - InP Ridge Etch (Oxford ICP Etcher)


Work In Progress

This article is still under construction. It may contain factual errors. Content is subject to change.

InP Ridge Etch: INSERT ETCH PARAMS (IPC< Pressure, gasses etc.)
Date Sample# Etch Rate (nm/min) Etch Selectivity (InP/SiO2) Comments SEM Images
2022-01-11 Software timing bugs fixed - new etch rate appears slightly higher. [1] (wrong)
2022-01-11 [2] (wrong)
2022-01-21 [3] (wrong)