Oven 4 (Thermo-Fisher HeraTherm)

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Oven 4 (Thermo-Fisher HeraTherm)
Location Bay 6
Tool Type Lithography
Manufacturer Thermo Scientific
Model HeraTherm
Description Programmable Oven

Primary Supervisor Michael Barreraz
(805) 893-4147

Secondary Supervisor

Aidan Hopkins

Recipes N/A

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This oven is often used for long thermal cures and wafer bonding. It has programmable temperature ramps and hold times, but the ramp rate is only "low/med./high" (not an exact ramp rate). A manual needle valve for nitrogen purge has been installed on the back of the oven.


  • Maximum Temperature = 330 C (no active cooling)
  • Gases: N2, manually set with needle valve (not programmable)
  • Multi-step programmable temperature ramps
  • Programmable atmospheric purge (for cooling)


To Do: User Manual