Oven 4 (Thermo-Fisher HeraTherm)
|
|
Description
|
Programmable Oven
|
Manufacturer
|
Thermo Scientific
|
Model
|
HeraTherm
|
|
|
About
This oven is often used for long thermal cures and wafer bonding. It has programmable temperature ramps and hold times, but the ramp rate is only "low/med./high" (not an exact ramp rate). A manual needle valve for nitrogen purge has been installed on the back of the oven.
Specifications
- Maximum Temperature = 330 C (no active cooling)
- Gases: N2, manually set with needle valve (not programmable)
- Multi-step programmable temperature ramps
- Programmable atmospheric purge (for cooling)
Documentation