Difference between revisions of "Oven 4 (Thermo-Fisher HeraTherm)"
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== Specifications == |
== Specifications == |
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| − | * Maximum Temperature = |
+ | * Maximum Temperature = 330 C (no active cooling) |
* Gases: N2, manually set with needle valve (not programmable) |
* Gases: N2, manually set with needle valve (not programmable) |
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* Multi-step programmable temperature ramps |
* Multi-step programmable temperature ramps |
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Revision as of 10:05, 29 October 2019
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About
This oven is often used for long thermal cures and wafer bonding. It has programmable temperature ramps and hold times, but the ramp rate is only "low/med./high" (not an exact ramp rate). A manual needle valve for nitrogen purge has been installed on the back of the oven.
Specifications
- Maximum Temperature = 330 C (no active cooling)
- Gases: N2, manually set with needle valve (not programmable)
- Multi-step programmable temperature ramps
- Programmable atmospheric purge (for cooling)
Documentation
| To Do: User Manual |