Difference between revisions of "Oven 4 (Thermo-Fisher HeraTherm)"

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m (John d moved page Oven 4 (Fisher) to Oven 4 (Thermo-Fisher HeraTherm): changed out for new oven)
(added info, needs verification)
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|super= Tony Bosch
 
|super= Tony Bosch
 
|location=Bay 6
 
|location=Bay 6
|description = ?
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|description = Programmable Oven
|manufacturer = Fisher Scientific
+
|manufacturer = Thermo Scientific
 +
|model = HeraTherm
 
}}
 
}}
 +
 +
== About ==
 +
This oven is often used for long thermal cures and wafer bonding.  It has programmable temperature ramps and hold times, but the ramp rate is only "low/med./high" (not an exact ramp rate).  A manual needle valve for nitrogen purge has been installed on the back of the oven.
 +
 +
== Specifications ==
 +
* Maximum Temperature = {{todo|find max. temp.}} (no active cooling)
 +
* Gases: N2, manually set with needle valve (not programmable)
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* Multi-step programmable temperature ramps
 +
* Programmable atmospheric purge (for cooling)
 +
 +
== Documentation ==
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* {{todo|User Manual}}

Revision as of 15:46, 11 June 2019

Oven 4 (Thermo-Fisher HeraTherm)
Oven4.jpg
Tool Type Lithography
Location Bay 6
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description Programmable Oven
Manufacturer Thermo Scientific
Model HeraTherm



About

This oven is often used for long thermal cures and wafer bonding. It has programmable temperature ramps and hold times, but the ramp rate is only "low/med./high" (not an exact ramp rate). A manual needle valve for nitrogen purge has been installed on the back of the oven.

Specifications

  • Maximum Temperature =
To Do: find max. temp.

(no active cooling)

  • Gases: N2, manually set with needle valve (not programmable)
  • Multi-step programmable temperature ramps
  • Programmable atmospheric purge (for cooling)

Documentation

To Do: User Manual