Other Dry Etching Recipes
Revision as of 15:14, 31 July 2020 by Ningcao (talk | contribs) (→CAIBE (Oxford Ion Mill): add a recipe file)
Back to Dry Etching Recipes.
XeF2 Etch (Xetch)
Vapor HF Etch (uETCH)
CAIBE (Oxford Ion Mill)
- Remind: From now on, one should always use Prf=200W! (see Brian Lingg for explanation)
- Pt Etch Recipe
- Au Etch Recipe
- Ni Etch Recipe
- InP Etch Recipe