Difference between revisions of "Other Dry Etching Recipes"
Jump to navigation
Jump to search
| Line 4: | Line 4: | ||
=[[Vapor HF Etch (uETCH)]]= |
=[[Vapor HF Etch (uETCH)]]= |
||
| − | *[[media:25-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool- |
+ | *[[media:25-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-a.pdf|SiO<sub>2</sub> Etch Recipe 1]] |
*[[media:26-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-2.pdf|SiO<sub>2</sub> Etch Recipe 2]] |
*[[media:26-Dry_Etch_of_Unaxis_ICP-grown_SiO2_using_Vapor_HF_tool-2.pdf|SiO<sub>2</sub> Etch Recipe 2]] |
||