Difference between revisions of "Other Dry Etching Recipes"
Jump to navigation
Jump to search
(→CAIBE (Oxford Ion Mill): add a recipe) |
(→CAIBE (Oxford Ion Mill): add a recipe file) |
||
| Line 12: | Line 12: | ||
*[https://wiki.nanotech.ucsb.edu/w/images/e/e3/44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Au Etch Recipe] |
*[https://wiki.nanotech.ucsb.edu/w/images/e/e3/44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Au Etch Recipe] |
||
*[https://wiki.nanotech.ucsb.edu/w/images/f/f1/45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Ni Etch Recipe] |
*[https://wiki.nanotech.ucsb.edu/w/images/f/f1/45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf Ni Etch Recipe] |
||
| + | *[https://wiki.nanotech.ucsb.edu/wiki/File:InP_Etching_result-CAIBE.docx InP Etch Recipe] |
||
| − | *InP Etch Recipe |
||
=Misc= |
=Misc= |
||
Revision as of 15:14, 31 July 2020
Back to Dry Etching Recipes.
XeF2 Etch (Xetch)
Vapor HF Etch (uETCH)
CAIBE (Oxford Ion Mill)
- Remind: From now on, one should always use Prf=200W! (see Brian Lingg for explanation)
- Pt Etch Recipe
- Au Etch Recipe
- Ni Etch Recipe
- InP Etch Recipe