Difference between revisions of "Other Dry Etching Recipes"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
Line 12: Line 12:
 
*[[media:45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf|Ni Etch Recipe]]
 
*[[media:45-Etching_Nickel_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf|Ni Etch Recipe]]
   
=[Misc]=
+
=Misc=

Revision as of 15:35, 16 December 2015