Difference between revisions of "Other Dry Etching Recipes"
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=[[CAIBE (Oxford Ion Mill)]]= |
=[[CAIBE (Oxford Ion Mill)]]= |
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*[[media:42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf|Pt Etch Recipe]] |
*[[media:42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf|Pt Etch Recipe]] |
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| + | *[[media:|Au Etch Recipe]] |
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Revision as of 15:53, 9 October 2015
Back to Dry Etching Recipes.
XeF2 Etch (Xetch)
Vapor HF Etch (uETCH)
CAIBE (Oxford Ion Mill)
- Pt Etch Recipe
- [[media:|Au Etch Recipe]]