Difference between revisions of "Other Dry Etching Recipes"
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=[[CAIBE (Oxford Ion Mill)]]= |
=[[CAIBE (Oxford Ion Mill)]]= |
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− | *[[media:*[[media:|Pt Etch Recipe]]|Pt Etch Recipe]] |
+ | *[[media:*[[media:42-Etching_Platinum_using_Oxford_Ion_Mill_Tool.pdf|Pt Etch Recipe]]|Pt Etch Recipe]] |
Revision as of 14:02, 22 July 2015
Back to Dry Etching Recipes.
XeF2 Etch (Xetch)
Vapor HF Etch (uETCH)
CAIBE (Oxford Ion Mill)
- [[media:*Pt Etch Recipe|Pt Etch Recipe]]