https://wiki.nanofab.ucsb.edu/w/index.php?title=Optical_Film_Thickness_(Nanometric)&feed=atom&action=history
Optical Film Thickness (Nanometric) - Revision history
2024-03-28T09:46:40Z
Revision history for this page on the wiki
MediaWiki 1.35.13
https://wiki.nanofab.ucsb.edu/w/index.php?title=Optical_Film_Thickness_(Nanometric)&diff=159912&oldid=prev
John d: note to use FIlmtrics F40, and locaiton=Removed From Lab
2022-05-13T14:30:15Z
<p>note to use FIlmtrics F40, and locaiton=Removed From Lab</p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 14:30, 13 May 2022</td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>|location=<ins class="diffchange diffchange-inline">REMOVED</ins> <ins class="diffchange diffchange-inline">FROM LAB</ins></div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|email=silva@ece.ucsb.edu</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|email=silva@ece.ucsb.edu</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|description = Reflectometer for optical thin film measurement</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|description = Reflectometer for optical thin film measurement</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>!<code>'''''Equipment removed from lab due to low usage on 2022-03-22'''''</code></div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>!<code>'''''Equipment removed from lab due to low usage on 2022-03-22'''''</code></div></td>
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John d
https://wiki.nanofab.ucsb.edu/w/index.php?title=Optical_Film_Thickness_(Nanometric)&diff=159724&oldid=prev
John d: formatting "unavaialble" note
2022-03-22T18:02:03Z
<p>formatting "unavaialble" note</p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 18:02, 22 March 2022</td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><br /></div></td>
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<td class="diff-marker"><a class="mw-diff-movedpara-left" title="Paragraph was moved. Click to jump to new location." href="#movedpara_3_4_rhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_2_0_lhs"></a><code>'''<del class="diffchange diffchange-inline">This</del> <del class="diffchange diffchange-inline">tool is currently unavailable - Tool Removed</del> from lab due to low usage on 2022-03-22'''</code></div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>|-</div></td>
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<td class="diff-marker"><a class="mw-diff-movedpara-right" title="Paragraph was moved. Click to jump to old location." href="#movedpara_2_0_lhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_3_4_rhs"></a><ins class="diffchange diffchange-inline">!</ins><code>'''<ins class="diffchange diffchange-inline">''Equipment</ins> <ins class="diffchange diffchange-inline">removed</ins> from lab due to low usage on 2022-03-22<ins class="diffchange diffchange-inline">''</ins>'''</code></div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=About=</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=About=</div></td>
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John d
https://wiki.nanofab.ucsb.edu/w/index.php?title=Optical_Film_Thickness_(Nanometric)&diff=159723&oldid=prev
John d: Note stating tool removed from lab.
2022-03-22T17:59:50Z
<p>Note stating tool removed from lab.</p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 17:59, 22 March 2022</td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|manufacturer = Nanometrics</div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>}}<del class="diffchange diffchange-inline"> </del></div></td>
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<td class="diff-marker"><a class="mw-diff-movedpara-left" title="Paragraph was moved. Click to jump to new location." href="#movedpara_4_2_rhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_3_0_lhs"></a>=<del class="diffchange diffchange-inline"> </del>About<del class="diffchange diffchange-inline"> </del>=</div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><code>'''This tool is currently unavailable - Tool Removed from lab due to low usage on 2022-03-22'''</code></div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"></td>
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<td class="diff-marker"><a class="mw-diff-movedpara-right" title="Paragraph was moved. Click to jump to old location." href="#movedpara_3_0_lhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_4_2_rhs"></a>=About=</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>This tool is for thickness and optical property measurements of films on silicon substrates. Other substrates are permitted, but results will not be accurate. The technique used is white light reflection. Data is taken with normal incidence reflection of white light (480 nm – 850 nm) from the surface and spectral data is captured through a spectrometer attached to the camera port of the microscope. The data is modeled and the optical parameters are adjusted to give a best least-squared fit to the data. Refractive index can be manually entered or used as a parameter in the fitting routine. Absorbing films will give incorrect results. This unit can measure thicknesses of films in spots down to approximately 10 um, allowing for measurement of thin films at various points in the processing.</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>This tool is for thickness and optical property measurements of films on silicon substrates. Other substrates are permitted, but results will not be accurate. The technique used is white light reflection. Data is taken with normal incidence reflection of white light (480 nm – 850 nm) from the surface and spectral data is captured through a spectrometer attached to the camera port of the microscope. The data is modeled and the optical parameters are adjusted to give a best least-squared fit to the data. Refractive index can be manually entered or used as a parameter in the fitting routine. Absorbing films will give incorrect results. This unit can measure thicknesses of films in spots down to approximately 10 um, allowing for measurement of thin films at various points in the processing.</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=Equipment Specifications=</div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>*480-850 nm reflection spectrum</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>*480-850 nm reflection spectrum</div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>*Designed for silicon substrates; others allowed, but accuracy not guaranteed</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>*Designed for silicon substrates; others allowed, but accuracy not guaranteed</div></td>
</tr>
</table>
John d
https://wiki.nanofab.ucsb.edu/w/index.php?title=Optical_Film_Thickness_(Nanometric)&diff=159375&oldid=prev
Silva at 15:34, 28 October 2021
2021-10-28T15:34:06Z
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|picture=Nanometric.jpg</div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>|super= <del class="diffchange diffchange-inline">Mike</del> <del class="diffchange diffchange-inline">Silva</del></div></td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>|super= <ins class="diffchange diffchange-inline">Bill</ins> <ins class="diffchange diffchange-inline">Millerski</ins></div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|phone=(805)839-3918x219</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|phone=(805)839-3918x219</div></td>
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<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|location=Bay 7</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|location=Bay 7</div></td>
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Silva
https://wiki.nanofab.ucsb.edu/w/index.php?title=Optical_Film_Thickness_(Nanometric)&diff=2095&oldid=prev
Biljana at 18:02, 22 August 2012
2012-08-22T18:02:09Z
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|super= Mike Silva</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|phone=(805)839-3918x219</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|phone=(805)839-3918x219</div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>|location=Bay <del class="diffchange diffchange-inline">?</del></div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>|location=Bay <ins class="diffchange diffchange-inline">7</ins></div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|email=silva@ece.ucsb.edu</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|email=silva@ece.ucsb.edu</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|description = Reflectometer for optical thin film measurement</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|description = Reflectometer for optical thin film measurement</div></td>
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Biljana
https://wiki.nanofab.ucsb.edu/w/index.php?title=Optical_Film_Thickness_(Nanometric)&diff=468&oldid=prev
Zwarburg at 16:57, 1 July 2012
2012-07-01T16:57:38Z
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|type = Inspection, Test and Characterization</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|type = Inspection, Test and Characterization</div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>|super= <del class="diffchange diffchange-inline">Tony</del> <del class="diffchange diffchange-inline">Bosch</del></div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>|super= <ins class="diffchange diffchange-inline">Mike</ins> <ins class="diffchange diffchange-inline">Silva</ins></div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>|phone=(805)839-<ins class="diffchange diffchange-inline">3918x219</ins></div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|description = Reflectometer for optical thin film measurement</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|description = Reflectometer for optical thin film measurement</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|manufacturer = Nanometrics</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|manufacturer = Nanometrics</div></td>
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Zwarburg
https://wiki.nanofab.ucsb.edu/w/index.php?title=Optical_Film_Thickness_(Nanometric)&diff=458&oldid=prev
Zwarburg at 16:13, 1 July 2012
2012-07-01T16:13:58Z
<p></p>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|super= Tony Bosch</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|phone=(805)839-3918x217</div></td>
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Zwarburg
https://wiki.nanofab.ucsb.edu/w/index.php?title=Optical_Film_Thickness_(Nanometric)&diff=457&oldid=prev
Zwarburg at 16:13, 1 July 2012
2012-07-01T16:13:37Z
<p></p>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>= About =</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>This tool is for thickness and optical property measurements of films on silicon substrates. Other substrates are permitted, but results will not be accurate. The technique used is white light reflection. Data is taken with normal incidence reflection of white light (480 nm – 850 nm) from the surface and spectral data is captured through a spectrometer attached to the camera port of the microscope. The data is modeled and the optical parameters are adjusted to give a best least-squared fit to the data. Refractive index can be manually entered or used as a parameter in the fitting routine. Absorbing films will give incorrect results. This unit can measure thicknesses of films in spots down to approximately 10 um, allowing for measurement of thin films at various points in the processing.</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>This tool is for thickness and optical property measurements of films on silicon substrates. Other substrates are permitted, but results will not be accurate. The technique used is white light reflection. Data is taken with normal incidence reflection of white light (480 nm – 850 nm) from the surface and spectral data is captured through a spectrometer attached to the camera port of the microscope. The data is modeled and the optical parameters are adjusted to give a best least-squared fit to the data. Refractive index can be manually entered or used as a parameter in the fitting routine. Absorbing films will give incorrect results. This unit can measure thicknesses of films in spots down to approximately 10 um, allowing for measurement of thin films at various points in the processing.</div></td>
</tr>
</table>
Zwarburg
https://wiki.nanofab.ucsb.edu/w/index.php?title=Optical_Film_Thickness_(Nanometric)&diff=455&oldid=prev
Zwarburg: Created page with "{{tool|{{PAGENAME}} |picture=Nanometric.jpg |type = Wet Processing |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay ? |email=bosch@ece.ucsb.edu |description = Reflectome…"
2012-07-01T16:12:06Z
<p>Created page with "{{tool|{{PAGENAME}} |picture=Nanometric.jpg |type = Wet Processing |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay ? |email=bosch@ece.ucsb.edu |description = Reflectome…"</p>
<p><b>New page</b></p><div>{{tool|{{PAGENAME}}<br />
|picture=Nanometric.jpg<br />
|type = Wet Processing<br />
|super= Tony Bosch<br />
|phone=(805)839-3918x217<br />
|location=Bay ?<br />
|email=bosch@ece.ucsb.edu<br />
|description = Reflectometer for optical thin film measurement<br />
|manufacturer = Nanometrics<br />
|materials = <br />
}} <br />
<br />
= About =<br />
This tool is for thickness and optical property measurements of films on silicon substrates. Other substrates are permitted, but results will not be accurate. The technique used is white light reflection. Data is taken with normal incidence reflection of white light (480 nm – 850 nm) from the surface and spectral data is captured through a spectrometer attached to the camera port of the microscope. The data is modeled and the optical parameters are adjusted to give a best least-squared fit to the data. Refractive index can be manually entered or used as a parameter in the fitting routine. Absorbing films will give incorrect results. This unit can measure thicknesses of films in spots down to approximately 10 um, allowing for measurement of thin films at various points in the processing.<br />
<br />
=Equipment Specifications=<br />
*480-850 nm reflection spectrum<br />
*Designed for silicon substrates; others allowed, but accuracy not guaranteed<br />
*150 A to tens of microns thickness measurements<br />
*Do not use refractive index option for very thin films<br />
*Manual wafer placement, up to 6" wafers<br />
*Objectives of 5x, 10x, and 20x for 40 um, 20 um, and 10 um spot sizes.; can measure film properties in small areas<br />
*Thicker films require lower objective magnification due to depth of focus<br />
*Programs for PR, SiO2, SiN on silicon</div>
Zwarburg