Difference between revisions of "Old training manual"
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*[https://drive.google.com/drive/folders/17N2SQtr2IQpIUSUDnlDengUK82frxaTH GCA 6300 Stepper Training Manual- Full version 2020.doc] |
*[https://drive.google.com/drive/folders/17N2SQtr2IQpIUSUDnlDengUK82frxaTH GCA 6300 Stepper Training Manual- Full version 2020.doc] |
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| + | *[//www.nanotech.ucsb.edu/wiki/images/3/32/New_PECVD1-SiO2-standard_recipe_2014_SiO2_standard_recipe.pdf SiN Standard Recipe] |
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| + | *[https://docs.google.com/spreadsheets/d/10ccfgCf5O0JM6L9J5XDz-gWVQz9P24VU/edit#gid= Table Si3N4 recipe] |
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| + | *[https://drive.google.com/drive/folders/17N2SQtr2IQpIUSUDnlDengUK82frxaTH Old training manual] |
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| + | *[https://drive.google.com/drive/folders/17N2SQtr2IQpIUSUDnlDengUK82frxaTH=Old training manual] |
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