OLD - PECVD2 Recipes
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PECVD2 Recipes
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OLD - PECVD2 Recipes
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Contents
1
PECVD 2 (Advanced Vacuum)
1.1
Photos
1.2
SiO
2
deposition (PECVD #2)
1.3
SiN deposition (PECVD #2)
1.4
LS SiN deposition (PECVD #2)
1.5
Amorphous-Si deposition (PECVD #2)
PECVD 2 (Advanced Vacuum)
Photos
Dirty platen
SiO
2
deposition (PECVD #2)
Oxide Standard Recipe
Oxide Data 2014
Oxide Thickness uniformity 2014
SiN deposition (PECVD #2)
Nitride2 Standard Recipe
Nitride2 Data 2014
Nitride2 Thickness uniformity 2014
LS SiN deposition (PECVD #2)
LS Nitride2 Standard Recipe
LS Nitride2 Data 2014
LS Nitride2 Thickness uniformity 2014
Amorphous-Si deposition (PECVD #2)
Amorphous Si Deposition Recipe
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