Difference between revisions of "OLD - PECVD2 Recipes"
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m (John d moved page PECVD2 Recipes to OLD - PECVD2 Recipes without leaving a redirect: this page is not linked anywhere, looks like 2014 data only) |
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=[[PECVD 2 (Advanced Vacuum)]]= |
=[[PECVD 2 (Advanced Vacuum)]]= |
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| + | ==Photos== |
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| − | *Deposition Rate: ≈ 8.17 nm/min (users must calibrate this prior to critical deps) |
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| − | *Refractive Index: ≈ 1.957 |
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| + | *[[media: Photos Sheet1.pdf|Dirty platen]] |
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| − | *Stress ≈ 499MPa |
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| − | *HF etch rate:~49nm/min |
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== SiO<sub>2</sub> deposition (PECVD #2) == |
== SiO<sub>2</sub> deposition (PECVD #2) == |
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| − | *[[media: |
+ | *[[media:NewAdvPECVD OXIDE 300C standard recipe.pdf|Oxide Standard Recipe]] |
| − | *[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dGJZaGtDTVRqa1BRdW5iU1N1Y01jd0E&usp=drive_web#gid=sharing Oxide Data |
+ | *[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dGJZaGtDTVRqa1BRdW5iU1N1Y01jd0E&usp=drive_web#gid=sharing Oxide Data 2014] |
*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dDRjSHEtYUZRUTg4azE2U0JGUTg2M1E#gid=sharing Oxide Thickness uniformity 2014] |
*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dDRjSHEtYUZRUTg4azE2U0JGUTg2M1E#gid=sharing Oxide Thickness uniformity 2014] |
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| − | *Deposition Rate: ≈ 28.50 nm/min (users must calibrate this prior to critical deps) |
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| − | *Refractive Index: ≈ 1.474 |
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| − | *Stress ≈ -252MPa |
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| − | *HF etch rate~616nm/min |
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==LS SiN deposition (PECVD #2) == |
==LS SiN deposition (PECVD #2) == |
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*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dENSak1ZNnVaVTFEQTBzdDJMSDlDTFE&usp=drive_web#gid=1=sharing LS Nitride2 Thickness uniformity 2014] |
*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dENSak1ZNnVaVTFEQTBzdDJMSDlDTFE&usp=drive_web#gid=1=sharing LS Nitride2 Thickness uniformity 2014] |
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| − | *Deposition Rate: ≈ 8.17 nm/min (users must calibrate this prior to critical deps) |
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| − | *Refractive Index: ≈ 1.935 |
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| − | *Stress ≈ -0.04MPa |
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| − | *HF etch rate~47nm/min |
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== Amorphous-Si deposition (PECVD #2) == |
== Amorphous-Si deposition (PECVD #2) == |
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