Difference between revisions of "OLD - PECVD2 Recipes"
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*[[media:AdvPECVD-LS Nitride2 300C standard recipe.pdf|LS Nitride2 Standard Recipe]] |
*[[media:AdvPECVD-LS Nitride2 300C standard recipe.pdf|LS Nitride2 Standard Recipe]] |
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| − | *[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEZvWVhzS1pHUXZkOGcyQWZ4LTNBWGc&usp=drive_web#gid=sharing LS Nitride2 Data |
+ | *[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEZvWVhzS1pHUXZkOGcyQWZ4LTNBWGc&usp=drive_web#gid=sharing LS Nitride2 Data October 2014] |
*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dENSak1ZNnVaVTFEQTBzdDJMSDlDTFE&usp=drive_web#gid=1=sharing LS Nitride2 Thickness uniformity 2014] |
*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dENSak1ZNnVaVTFEQTBzdDJMSDlDTFE&usp=drive_web#gid=1=sharing LS Nitride2 Thickness uniformity 2014] |
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| − | *Deposition Rate: ≈ |
+ | *Deposition Rate: ≈ 7.96 nm/min (users must calibrate this prior to critical deps) |
| − | *Refractive Index: ≈ 1. |
+ | *Refractive Index: ≈ 1.937 |
| − | *Stress ≈ |
+ | *Stress ≈ 2.77MPa |
| − | *HF etch rate~ |
+ | *HF etch rate~47nm/min |
== Amorphous-Si deposition (PECVD #2) == |
== Amorphous-Si deposition (PECVD #2) == |
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Revision as of 08:01, 14 October 2014
PECVD 2 (Advanced Vacuum)
SiN deposition (PECVD #2)
- Deposition Rate: ≈ 7.99 nm/min (users must calibrate this prior to critical deps)
- Refractive Index: ≈ 1.958
- Stress ≈ 495MPa
- HF etch rate:~49nm/min
SiO2 deposition (PECVD #2)
- Deposition Rate: ≈ 28.50 nm/min (users must calibrate this prior to critical deps)
- Refractive Index: ≈ 1.474
- Stress ≈ -259MPa
- HF etch rate~626nm/min
LS SiN deposition (PECVD #2)
- Deposition Rate: ≈ 7.96 nm/min (users must calibrate this prior to critical deps)
- Refractive Index: ≈ 1.937
- Stress ≈ 2.77MPa
- HF etch rate~47nm/min