Difference between revisions of "NanoFab Process Group"
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(Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") |
(Examples for Users section, with Links to Example Trello Job Board & example google drive folder.) |
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| − | ''This page lists various processes used internally by the [https://wiki.nanotech.ucsb.edu/ |
+ | ''This page lists various processes used internally by the [https://wiki.nanotech.ucsb.edu/w/index.php?title=Staff_List#Process_Group NanoFab Process Group].'' |
| − | == |
+ | ==Dicing Procedures== |
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+ | ===Photoresist Application, Cleaning and Shipping=== |
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''For providing alignment marks to use while dicing.'' |
''For providing alignment marks to use while dicing.'' |
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| + | *[[ProcessGroup: Unaxis PM3 Process Verification Procedure|Unaxis PM3: Process Verification Procedure]] |
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| + | *[[ProcessGroup: IBD Process Verification Procedure|Veeco IBD: Process Verification Procedure]] |
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| + | ==Equipment Calibration Procedures== |
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| − | === |
+ | ===Lithography Tools=== |
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+ | *[[ProcessGroup: GCA AutoStep 200, Stepper|GCA AutoStep 200, Stepper #2: Calibration procedure]] |
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+ | *[[ProcessGroup: ASML 5500 Stepper|ASML 5500 Stepper#3: Calibration Verification/Update procedure]] |
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| − | == |
+ | == Examples for Users == |
| + | Example of Job Organization, Data Organization, Travelers and Design of Experiements for users. |
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| + | * [https://trello.com/invite/b/Oxs8nMlt/ATTIcb107c9120edae48f4ba24b401e083339096A145/example-jobs-board Example Trello task tracking board], and the corresponding: |
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| + | * [https://drive.google.com/drive/folders/19N4LyL9eba5DHeaWObbQFAlkFSTQSBA8?usp=sharing Google Drive folder], linked from the above cards, containing travelers, 'fab data etc. |
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| − | * [[ProcessGroup: GCA AutoStep 200, Stepper|GCA AutoStep 200, Stepper #2: Calibration procedure]] |
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| − | * [[ProcessGroup: ASML 5500 Stepper|ASML 5500 Stepper#3: Calibration Verification/Update procedure]] |
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Latest revision as of 16:46, 11 September 2023
This page lists various processes used internally by the NanoFab Process Group.
Dicing Procedures
Photoresist Application, Cleaning and Shipping
- PR Spin for Dicing Protect - ~800nm thick PR only (UV6)
- PR Clean of UV-6
- Shipping Samples on Dicing Tape+Frame
Dicing Alignment Mark Exposure
For providing alignment marks to use while dicing.
- ASML Stepper #3: Dicing Alignment Guides
- How to program the ASML to shoot some alignment markers for use during dicing.
Process Control Calibration Procedures
Etching Tools
- Unaxis PM1: Indium Phosphide Etch Verification Procedure
- ICP#1/2: SiO2 Etch Verification Procedure
- PlasmaTherm SLR: SiO2 Etch Verification Procedure
- PlasmaTherm DSEiii: Si Etch Verification Procedure
Deposition Tools
- PECVD#1: Process Verification Procedure
- PECVD#2: Process Verification Procedure
- Unaxis PM3: Process Verification Procedure
- Veeco IBD: Process Verification Procedure
Equipment Calibration Procedures
Lithography Tools
- GCA 6300 Stepper #1: Calibration Procedure
- GCA AutoStep 200, Stepper #2: Calibration procedure
- ASML 5500 Stepper#3: Calibration Verification/Update procedure
Examples for Users
Example of Job Organization, Data Organization, Travelers and Design of Experiements for users.
- Example Trello task tracking board, and the corresponding:
- Google Drive folder, linked from the above cards, containing travelers, 'fab data etc.