Difference between revisions of "NanoFab Process Group"
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(created page, Links to various dicing procedures. Added Process Control links as well.) |
(Text replacement - "www.nanotech.ucsb.edu/wiki/" to "wiki.nanotech.ucsb.edu/wiki/") |
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| − | ''This page lists various processes used internally by the [https:// |
+ | ''This page lists various processes used internally by the [https://wiki.nanotech.ucsb.edu/wiki/index.php/Staff_List#Process_Group NanoFab Process Group].'' |
== Dicing Procedures == |
== Dicing Procedures == |
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* [[ProcessGroup: PR Spin for Dicing Protect - UV6|PR Spin for Dicing Protect]] - ~800nm thick PR only (UV6) |
* [[ProcessGroup: PR Spin for Dicing Protect - UV6|PR Spin for Dicing Protect]] - ~800nm thick PR only (UV6) |
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* [[ProcessGroup: PR Clean of UV-6|PR Clean of UV-6]] |
* [[ProcessGroup: PR Clean of UV-6|PR Clean of UV-6]] |
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| − | * [[ProcessGroup: Shipping on |
+ | * [[ProcessGroup: Shipping Samples on Dicing Tape+Frame|Shipping Samples on Dicing Tape+Frame]] |
=== Dicing Alignment Mark Exposure === |
=== Dicing Alignment Mark Exposure === |
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* [[ProcessGroup: Unaxis PM3 Process Verification Procedure|Unaxis PM3: Process Verification Procedure]] |
* [[ProcessGroup: Unaxis PM3 Process Verification Procedure|Unaxis PM3: Process Verification Procedure]] |
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* [[ProcessGroup: IBD Process Verification Procedure|Veeco IBD: Process Verification Procedure]] |
* [[ProcessGroup: IBD Process Verification Procedure|Veeco IBD: Process Verification Procedure]] |
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| + | == Equipment Calibration Procedures == |
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| + | |||
| + | === Lithography Tools === |
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| + | * [[ProcessGroup: GCA 6300 Stepper|GCA 6300 Stepper #1: Calibration Procedure]] |
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| + | * [[ProcessGroup: GCA AutoStep 200, Stepper|GCA AutoStep 200, Stepper #2: Calibration procedure]] |
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| + | * [[ProcessGroup: ASML 5500 Stepper|ASML 5500 Stepper#3: Calibration Verification/Update procedure]] |
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Revision as of 18:33, 6 April 2020
This page lists various processes used internally by the NanoFab Process Group.
Dicing Procedures
Photoresist Application, Cleaning and Shipping
- PR Spin for Dicing Protect - ~800nm thick PR only (UV6)
- PR Clean of UV-6
- Shipping Samples on Dicing Tape+Frame
Dicing Alignment Mark Exposure
For providing alignment marks to use while dicing.
- ASML Stepper #3: Dicing Alignment Guides
- How to program the ASML to shoot some alignment markers for use during dicing.
Process Control Calibration Procedures
Etching Tools
- Unaxis PM1: Indium Phosphide Etch Verification Procedure
- ICP#1/2: SiO2 Etch Verification Procedure
- PlasmaTherm SLR: SiO2 Etch Verification Procedure
- PlasmaTherm DSEiii: Si Etch Verification Procedure
Deposition Tools
- PECVD#1: Process Verification Procedure
- PECVD#2: Process Verification Procedure
- Unaxis PM3: Process Verification Procedure
- Veeco IBD: Process Verification Procedure