Mike Silva

Mike Silva Position Senior Development Engineer Room Number 1109C Phone (805) 839-3918x219 Cell (805) 245-9356 E-Mail silva@ece.ucsb.edu

About

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Current Work

Information to come.

Tools

Mike Silva is in charge of the following tools:

DUV Flood Expose High Temp Oven (Blue M) Sputter 5 (Lesker AXXIS) PECVD 2 (Advanced Vacuum) Thermal Evap 1 Ion Beam Deposition (Veeco NEXUS) ICP Etch 2 (Panasonic E640) Plasma Clean (Gasonics 2000)

HF Vapor Etch Tube Furnace Wafer Bonding (Thermco) Step Profile (Dektak IIA) Step Profilometer (Dektak 6M) Ellipsometer (Rudolph) Film Stress (Tencor Flexus) Optical Film Thickness (Nanometric)