Mike Silva

Mike Silva Position Senior Development Engineer Room Number 1109B Phone (805) 893-3096 Cell (805) 450-2263 E-Mail silva@ece.ucsb.edu

About

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Current Work

Information to come.

Tools

Mike Silva is in charge of the following tools:

High Temp Oven (Blue M) Sputter 5 (Lesker AXXIS) Ion Beam Deposition (Veeco NEXUS) ICP Etch 2 (Panasonic E640) Plasma Clean (Gasonics 2000)

HF Vapor Etch Tube Furnace Wafer Bonding (Thermco) Step Profilometer (Dektak 6M) Film Stress (Tencor Flexus) Optical Film Thickness (Nanometric)