Mechanical Polisher (Allied)

Mechanical Polisher (Allied) Tool Type Wet Processing Location ESB 111x? Supervisor Brian Lingg Supervisor Phone (805) 893-8145 Supervisor E-Mail lingg_b@ucsb.edu Description Mechanical Polisher Manufacturer Allied High Tech Products Inc. Model 10-1110 Sign up for this tool

About

The Allied Polisher allows for bulk thinning of substrates, and fine polishing of optical waveguide facets. Various materials are typically lapped/polished, such as Silicon GaAs, InP.

Detailed Specs

• Max. Substrate Size
• Lapping Films available:
  • 10µm AlOx
  • 5µm AlOx
  • 2µm AlOx
  • 1µm AlOx
  • 0.5 AlOx

Operating Procedures

• To Be Added

Recipes

• To Be Added