Difference between revisions of "Mechanical Polisher (Allied)"

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|picture=AlliedPolisher10-1110.jpg
 
|picture=AlliedPolisher10-1110.jpg
 
|type = Wet Processing
 
|type = Wet Processing
|super= Brian Lingg
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|super= Bill Millerski
 
|location=ESB 111x?
 
|location=ESB 111x?
 
|description = Mechanical Polisher
 
|description = Mechanical Polisher

Latest revision as of 08:32, 28 October 2021

Mechanical Polisher (Allied)
AlliedPolisher10-1110.jpg
Tool Type Wet Processing
Location ESB 111x?
Supervisor Bill Millerski
Supervisor Phone (805) 893-2655
Supervisor E-Mail wmillerski@ucsb.edu
Description Mechanical Polisher
Manufacturer Allied High Tech Products Inc.
Model 10-1110
Sign up for this tool


About

The Allied Polisher allows for bulk thinning of substrates, and fine polishing of optical waveguide facets. Various materials are typically lapped/polished, such as Silicon GaAs, InP.

Detailed Specs

  • Max. Substrate Size
  • Lapping Films available:
    • 10µm AlOx
    • 5µm AlOx
    • 2µm AlOx
    • 1µm AlOx
    • 0.5 AlOx

Operating Procedures

  • To Be Added

Recipes

  • To Be Added