Difference between revisions of "Mechanical Polisher (Allied)"
Jump to navigation
Jump to search
(initial Page) |
Millerski w (talk | contribs) (Added SOP Link) |
||
| (3 intermediate revisions by 2 users not shown) | |||
| Line 1: | Line 1: | ||
| − | {{ | + | {{tool2|{{PAGENAME}} |
|picture=AlliedPolisher10-1110.jpg | |picture=AlliedPolisher10-1110.jpg | ||
|type = Wet Processing | |type = Wet Processing | ||
| − | |super= | + | |super= Bill Millerski |
| − | |location=ESB | + | |location=ESB Rm. 1111 |
|description = Mechanical Polisher | |description = Mechanical Polisher | ||
|manufacturer = Allied High Tech Products Inc. | |manufacturer = Allied High Tech Products Inc. | ||
| Line 10: | Line 10: | ||
|toolid=70 | |toolid=70 | ||
}} | }} | ||
| − | = About | + | =About= |
The Allied Polisher allows for bulk thinning of substrates, and fine polishing of optical waveguide facets. Various materials are typically lapped/polished, such as Silicon GaAs, InP. | The Allied Polisher allows for bulk thinning of substrates, and fine polishing of optical waveguide facets. Various materials are typically lapped/polished, such as Silicon GaAs, InP. | ||
| − | == Detailed Specs == | + | ==Detailed Specs== |
| − | |||
| − | |||
| − | |||
| − | |||
| − | |||
| − | |||
| − | |||
| − | == Operating Procedures == | + | *Max. Substrate Size |
| − | * ''To Be Added'' | + | *Lapping Films available: |
| + | **10µm AlOx | ||
| + | **5µm AlOx | ||
| + | **2µm AlOx | ||
| + | **1µm AlOx | ||
| + | **0.5 AlOx | ||
| + | |||
| + | ==Operating Procedures== | ||
| + | |||
| + | *[https://wiki.nanotech.ucsb.edu/w/images/f/f2/Mechanical_Polisher_SOP_Rev_A.pdf Mechanical Polisher SOP] | ||
| + | |||
| + | ==Recipes== | ||
| + | |||
| + | *''To Be Added'' | ||
Latest revision as of 09:06, 15 May 2023
| ||||||||||||||||||||||||||||
About
The Allied Polisher allows for bulk thinning of substrates, and fine polishing of optical waveguide facets. Various materials are typically lapped/polished, such as Silicon GaAs, InP.
Detailed Specs
- Max. Substrate Size
- Lapping Films available:
- 10µm AlOx
- 5µm AlOx
- 2µm AlOx
- 1µm AlOx
- 0.5 AlOx
Operating Procedures
Recipes
- To Be Added