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Important Announcements 1 AFM: DOWN Pins broken off AFM head, head is currently out for repair. // John d 11:32, 11 May 2022 (PDT) 2 F50 UP The Filmetrics F50 Wafer Mapper is repaired and up. Tool has been relocated to Bay 7, just before the EBL room. // John d 07:24, 10 May 2022 (PDT) 3 F10-RT UP The Filmetrics F10-RT is UP! //Thibeault 10:20, 11 May 2022 (PDT) 4 LEXT Confocal: UP LEXT Confocal microscope is UP! //Thibeault 10:20, 11 May 2022 (PDT) 5 New COVID protocols Please read the linked letter below (on Wiki) regarding masking policy changes, effective Saturday, March 19. The nanofab will follow this policy with masks being optional for everyone in all sections of the facility beginning March 19. All users must adhere to the campus policies as outlined in the letter from Chancellor Yang, including testing where required. Link: March 16th 2022- Letter from Office of the Chancellor See the full policies at COVID-19_User_Policies // John d 16:08, 21 March 2022 (PDT) 6 New EBL Rates Effective Dec.1, 2021, all of our electron beam lithography rates are lowered. The new rates are as follows: Industrial Users: $405/hour UC Academic Users: $126/hour Non-UC Academic Users: $150/hour UCSB CNSI Incubator USers: $260/hour //Thibeault 12:21, 9 December 2021 (PST) 7 How to use this wiki NanoFab Users are responsible for understanding their chemistry, risks and usage of various chemicals. Please read the MSDS sheets for the chemicals you use! Users can add qualified processing data to the Wiki pages; see the Editing_Tutorials for how to do that. Supervisors of individuals using the facility, e.g., UCSB Principal Investigators and external user managers are ultimately responsible for ensuring that their supervisees have the appropriate knowledge and training to work safely in the facility. They are also responsible for ensuring that all applicable regulatory requirements are met. This includes having a compliant "Chemical Hygiene Plan" per OSHA regulations. The information on this site should be considered as providing "general supporting information" to the Chemical Hygiene Plan of a particular supervisor. Supervisors can reference all or some of this site information within their Plans. UCSB EH&S can provide assistance to supervisors in preparing their Plans. 8 News & Announcements News from the U.C. Santa Barbara Nanofabrication Facility. Oxford PlasmaPro ICP Etcher installed We have a new ICP etcher in Bay 2: Oxford_ICP_Etcher_(PlasmaPro_100_Cobra) The tool has been qualified for InP Ridge and InGaAsP Grating etches, and is intended for III-V etching in general (GaAs, GaN, GaSb etc.) In addition, the tool is capable of Atomic Layer Etching on various materials. Contact the supervisor for training. // John d 11:27, 29 September 2021 (PDT) 9 SiO2 etching, High-Aspect Ratio Dr. Bill Mitchell recently published an article detailing high-aspect ratio SiO2 etching (JVST-A, May 2021) in the Plasma-Therm Fluorine ICP etcher, using a novel Ruthenium Hard Mask. Ruthenium can be deposited using the Oxford ALD or AJA Sputter and etched in one of the Panasonic ICP's. You can find a full process flow at the FL-ICP's Recipe Page, in this case using a Sputtered Ru hard mask and I-line stepper lithography. // John d 08:05, 27 May 2021 (PDT) 10 Wafer Polisher available We have added an Allied Wafer Polish tool to our equipment list. Contact Brian Lingg for more information. // John d 16:49, 10 May 2021 (PDT) 11 Digital Microscope: Olympus DSX-1000 You'll see a new digital microscope in Bay 4/Metrology, that's our new Olympus DSX-1000. We are currently developing procedures, keep an eye out for training emails. // John d 13:49, 8 April 2021 (PDT) 12 Raith Velion: FIB/SEM Installation We have installed a new state-of-the-art focused ion beam/electron beam tool in Bay 1. The Raith Velion enables synchronized interferometric stage, Focused-ion Beam Lithography with ~10nm features or less, live SEM during writing, and Electron-Beam Lithography. Learn more about the tool's capabilities at the Raith website: Raith Products: Velion. VIDEO: Synchronized FIB beam + Laser Interferometric Stage write, with live SEM Tool qualification is currently underway. Dr. Dan Read is be the resident expert on this new tool. // John d 06:53, 30 November 2020 (PST) Important Links: Staff List Tool List Chemical List & MSDS Sheets Lab Rules FAQs External Links: SignUpMonkey NanoTech Homepage UCSB EE Dept. Get into the Lab Fabrication Services Seminars: Tech Talks Seminar Series

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