https://wiki.nanofab.ucsb.edu/w/index.php?title=MLA150_-_Troubleshooting&feed=atom&action=history
MLA150 - Troubleshooting - Revision history
2024-03-28T11:17:58Z
Revision history for this page on the wiki
MediaWiki 1.35.13
https://wiki.nanofab.ucsb.edu/w/index.php?title=MLA150_-_Troubleshooting&diff=161922&oldid=prev
John d: /* Causes */ added OAF driving off wafer
2024-03-20T22:05:59Z
<p><span dir="auto"><span class="autocomment">Causes: </span> added OAF driving off wafer</span></p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 22:05, 20 March 2024</td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>#The Optical AutoFocus laser is starting the write on an extremely non-uniform part of the photoresist spin (eg. corner of quarter-wafer), which causes it to drive out of focus before the write starts.</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>#The Optical AutoFocus laser is starting the write on an extremely non-uniform part of the photoresist spin (eg. corner of quarter-wafer), which causes it to drive out of focus before the write starts.</div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>#The Optical Autofocus driving off/onto a round wafer can also cause it to go out of focus during the write, with no warnings (it'll keep exposing).</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>#Very dark (low reflection) areas of the wafer can also cause the OptAF surface detection to lose signal, and lose the feedback signal needed to maintain focus during a write.</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>#Very dark (low reflection) areas of the wafer can also cause the OptAF surface detection to lose signal, and lose the feedback signal needed to maintain focus during a write.</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>===Solution for 3-4 inch wafers===</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>===Solution for 3-4 inch wafers===</div></td>
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<td class="diff-marker"><a class="mw-diff-movedpara-left" title="Paragraph was moved. Click to jump to new location." href="#movedpara_5_0_rhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_3_0_lhs"></a>*Try removing the edge-bead of your PR: [[Photolithography - Manual Edge-Bead Removal Techniques]]</div></td>
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<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>*Adjust your design/CAD file so the design is about ≥10mm from the edges of the wafer (in the Y direction especially) has been reported to help. The write-head overtravels past the CAD design by ~8-9mm, so this can prevent the head from hitting the PR edge-bead/wafer-edge (the cause of focus-loss).</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>*Adjust your design/CAD file so the design is about ≥10mm from the edges of the wafer (in the Y direction especially) has been reported to help. The write-head overtravels past the CAD design by ~8-9mm, so this can prevent the head from hitting the PR edge-bead/wafer-edge (the cause of focus-loss).</div></td>
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<td colspan="2" class="diff-empty"> </td>
<td class="diff-marker"><a class="mw-diff-movedpara-right" title="Paragraph was moved. Click to jump to old location." href="#movedpara_3_0_lhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_5_0_rhs"></a>*Try removing the edge-bead of your PR: [[Photolithography - Manual Edge-Bead Removal Techniques]]</div></td>
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<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>*For large substrates, switching to Pneumatic Autofocus works well (although focus repeatabiity is less stable, eg. focus shifts by ±5 over a few weeks). PneuAF causes a few-mm of edge-bead area to expose out-of-focus, which is acceptable for full-wafers, but often too large exclusion for smaller samples.</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>*For large substrates, switching to Pneumatic Autofocus works well (although focus repeatabiity is less stable, eg. focus shifts by ±5 over a few weeks). PneuAF causes a few-mm of edge-bead area to expose out-of-focus, which is acceptable for full-wafers, but often too large exclusion for smaller samples.</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**Contact the supervisor for info on switching to Pneumatic AF. <u>'''Do NOT use PneuAF without first asking Staff!'''</u> There is significant <u>'''crash'''</u> potential if performed incorrectly.</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**Contact the supervisor for info on switching to Pneumatic AF. <u>'''Do NOT use PneuAF without first asking Staff!'''</u> There is significant <u>'''crash'''</u> potential if performed incorrectly.</div></td>
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John d
https://wiki.nanofab.ucsb.edu/w/index.php?title=MLA150_-_Troubleshooting&diff=161827&oldid=prev
John d: /* Greyscale Lithography Limitations */ updated link
2024-02-03T05:06:23Z
<p><span dir="auto"><span class="autocomment">Greyscale Lithography Limitations: </span> updated link</span></p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 05:06, 3 February 2024</td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Greyscale Lithography Limitations==</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Greyscale Lithography Limitations==</div></td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>The MLA150 does have grey-scale patterning capabilities, but has some limitations & workarounds that we have identified. Please see this page for the [[MLA150 - Design Guidelines#Limitations|Greyscale limitations and design guidelines.]]</div></td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>The MLA150 does have grey-scale patterning capabilities, but has some limitations & workarounds that we have identified. Please see this page for the [[MLA150 - Design Guidelines#Limitations<ins class="diffchange diffchange-inline"> .26 Workarounds</ins>|Greyscale limitations and design guidelines.]]</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Rebooting the Computer==</div></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Rebooting the Computer==</div></td>
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John d
https://wiki.nanofab.ucsb.edu/w/index.php?title=MLA150_-_Troubleshooting&diff=161825&oldid=prev
John d: minor additons/grammar
2024-02-03T04:41:03Z
<p>minor additons/grammar</p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 04:41, 3 February 2024</td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>*Try removing the edge-bead of your PR: [[Photolithography - Manual Edge-Bead Removal Techniques]]</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>*Try removing the edge-bead of your PR: [[Photolithography - Manual Edge-Bead Removal Techniques]]</div></td>
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<td colspan="2" class="diff-empty"> </td>
<td class="diff-marker"><a class="mw-diff-movedpara-right" title="Paragraph was moved. Click to jump to old location." href="#movedpara_4_0_lhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_1_0_rhs"></a>*<ins class="diffchange diffchange-inline">Adjust</ins> your design/CAD file so the design is<ins class="diffchange diffchange-inline"> about</ins> ≥10mm from the edges of the wafer (in the Y direction especially) has been reported to help. The <ins class="diffchange diffchange-inline">write-</ins>head overtravels past the<ins class="diffchange diffchange-inline"> CAD</ins> design by ~8-9mm, so this can prevent the head from hitting the PR edge-bead/wafer-edge<ins class="diffchange diffchange-inline"> (the cause of focus-loss)</ins>.</div></td>
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<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>*If the edges of your wafer have very low reflection surfaces (black, rough etc.), then you may need to try the following:</div></td>
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<td colspan="2" class="diff-empty"> </td>
<td class="diff-marker"><a class="mw-diff-movedpara-right" title="Paragraph was moved. Click to jump to old location." href="#movedpara_6_0_lhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_3_0_rhs"></a>*For large substrates, switching to Pneumatic Autofocus works well (although focus repeatabiity is less stable, eg.<ins class="diffchange diffchange-inline"> focus shifts by ±5</ins> over <ins class="diffchange diffchange-inline">a few</ins> <ins class="diffchange diffchange-inline">weeks</ins>). PneuAF causes a few-mm of edge-bead area to expose out-of-focus, which is acceptable for full-wafers, but often too large exclusion for smaller samples.</div></td>
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<td class="diff-marker"><a class="mw-diff-movedpara-left" title="Paragraph was moved. Click to jump to new location." href="#movedpara_1_0_rhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_4_0_lhs"></a>*<del class="diffchange diffchange-inline">Adjusting</del> your design/CAD file so the design is ≥10mm from the edges of the wafer (in the Y direction especially) has been reported to help. The head overtravels past the design by ~8-9mm, so this can prevent the head from hitting the PR edge-bead/wafer-edge.</div></td>
<td colspan="2" class="diff-empty"> </td>
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<td colspan="2" class="diff-empty"> </td>
<td class="diff-marker"><a class="mw-diff-movedpara-right" title="Paragraph was moved. Click to jump to old location." href="#movedpara_8_0_lhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_5_0_rhs"></a><ins class="diffchange diffchange-inline">*</ins>*Contact the supervisor for info on switching to Pneumatic AF. <u>'''Do NOT use PneuAF without first asking Staff!'''</u> There is significant <u>'''crash'''</u> potential if performed incorrectly.</div></td>
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<td class="diff-marker"><a class="mw-diff-movedpara-left" title="Paragraph was moved. Click to jump to new location." href="#movedpara_3_0_rhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_6_0_lhs"></a>*For large substrates, switching to Pneumatic Autofocus works well (although focus repeatabiity is less stable, eg. over <del class="diffchange diffchange-inline">~6</del> <del class="diffchange diffchange-inline">months</del>). PneuAF causes a few-mm of edge-bead area to expose out-of-focus, which is acceptable for full-wafers, but often too large exclusion for smaller samples.</div></td>
<td colspan="2" class="diff-empty"> </td>
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<td colspan="2" class="diff-empty"> </td>
<td class="diff-marker"><a class="mw-diff-movedpara-right" title="Paragraph was moved. Click to jump to old location." href="#movedpara_10_0_lhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_7_0_rhs"></a><ins class="diffchange diffchange-inline">*</ins>*PneuAF will usually have a slightly different defocus offset compared to OptAF. You should run a new FEM/Series with PneAF.</div></td>
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<td class="diff-marker"><a class="mw-diff-movedpara-left" title="Paragraph was moved. Click to jump to new location." href="#movedpara_5_0_rhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_8_0_lhs"></a>*Contact the supervisor for info on switching to Pneumatic AF. <u>'''Do NOT use PneuAF without first asking Staff!'''</u> There is significant <u>'''crash'''</u> potential if performed incorrectly.</div></td>
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<td class="diff-marker"><a class="mw-diff-movedpara-right" title="Paragraph was moved. Click to jump to old location." href="#movedpara_11_0_lhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_9_0_rhs"></a><ins class="diffchange diffchange-inline">*</ins>*PneuAF will require Focus/Exposure calibration (in Series mode) more often than OptAF.</div></td>
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<tr>
<td class="diff-marker"><a class="mw-diff-movedpara-left" title="Paragraph was moved. Click to jump to new location." href="#movedpara_7_0_rhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_10_0_lhs"></a>*PneuAF will usually have a slightly different defocus offset compared to OptAF. You should run a new FEM/Series with PneAF.</div></td>
<td colspan="2" class="diff-empty"> </td>
</tr>
<tr>
<td class="diff-marker"><a class="mw-diff-movedpara-left" title="Paragraph was moved. Click to jump to new location." href="#movedpara_9_0_rhs">⚫</a></td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><a name="movedpara_11_0_lhs"></a>*PneuAF will require Focus/Exposure calibration (in Series mode) more often than OptAF.</div></td>
<td colspan="2" class="diff-empty"> </td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>===Debugging===</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>===Debugging===</div></td>
</tr>
<tr>
<td colspan="2" class="diff-lineno">Line 89:</td>
<td colspan="2" class="diff-lineno">Line 88:</td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>===Workaround===</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>===Workaround===</div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>#During Job <u>Setup</u>, <del class="diffchange diffchange-inline">Make</del> sure <del class="diffchange diffchange-inline">you choose one of the staff-made <u>Resist</u> templates, which enable the ''extended defocus'' software option. When in doubt, just</del> choose "'''''_General-Focus'''''". User-made Resist templates usually won't have the setting correctly applied, unless they copied a Staff resist.</div></td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>#During Job <u>Setup</u>, <ins class="diffchange diffchange-inline">make</ins> sure <ins class="diffchange diffchange-inline">to</ins> choose "'''''_General-Focus'''''". User-made Resist templates usually won't have the setting correctly applied, unless they copied a Staff resist.</div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>#In the <u>Exposure</u> screen - after wafer load etc. - you may still edit the defocus range, and in this screen you are able to type in the full range ±25. For a Series exposure (focus-exposure matrix, FEM), you can choose the "_Manual" template during <u>Setup</u>, and on the <u>Expose</u> screen you can edit the Series array to your needs with full defocus range.</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>#In the <u>Exposure</u> screen - after wafer load etc. - you may still edit the defocus range, and in this screen you are able to type in the full range ±25. For a Series exposure (focus-exposure matrix, FEM), you can choose the "_Manual" template during <u>Setup</u>, and on the <u>Expose</u> screen you can edit the Series array to your needs with full defocus range.</div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td colspan="2" class="diff-lineno">Line 113:</td>
<td colspan="2" class="diff-lineno">Line 112:</td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>You can find more troubleshooting info about the Nanofiles FTP at the corresponding [[Frequently Asked Questions#How do I get my files from the NanoFab computers.3F|Frequently Asked Questions section]].</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>You can find more troubleshooting info about the Nanofiles FTP at the corresponding [[Frequently Asked Questions#How do I get my files from the NanoFab computers.3F|Frequently Asked Questions section]].</div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>==Aligning to a quarter-wafer==</div></td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>==Aligning to a quarter-wafer<ins class="diffchange diffchange-inline">/irregular piece</ins>==</div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>For alignment of your die to a quarter-wafer, one accurate method for accounting for both rotation and die placement is to</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>For alignment of your die to a quarter-wafer, one accurate method for accounting for both rotation and die placement is to</div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td colspan="2" class="diff-lineno">Line 139:</td>
<td colspan="2" class="diff-lineno">Line 138:</td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Greyscale Lithography Limitations==</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Greyscale Lithography Limitations==</div></td>
</tr>
<tr>
<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>The MLA150 does have grey-scale patterning capabilities, but has some limitations that we have identified. Please see this page for the [[MLA150 - Design Guidelines#Limitations|Greyscale limitations and design guidelines.]]</div></td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>The MLA150 does have grey-scale patterning capabilities, but has some limitations<ins class="diffchange diffchange-inline"> & workarounds</ins> that we have identified. Please see this page for the [[MLA150 - Design Guidelines#Limitations|Greyscale limitations and design guidelines.]]</div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Rebooting the Computer==</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Rebooting the Computer==</div></td>
</tr>
</table>
John d
https://wiki.nanofab.ucsb.edu/w/index.php?title=MLA150_-_Troubleshooting&diff=161491&oldid=prev
John d: /* Stitching */
2023-11-02T22:47:47Z
<p><span dir="auto"><span class="autocomment">Stitching</span></span></p>
<table class="diff diff-contentalign-left diff-editfont-monospace" data-mw="interface">
<col class="diff-marker" />
<col class="diff-content" />
<col class="diff-marker" />
<col class="diff-content" />
<tr class="diff-title" lang="en">
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 22:47, 2 November 2023</td>
</tr><tr>
<td colspan="2" class="diff-lineno">Line 68:</td>
<td colspan="2" class="diff-lineno">Line 68:</td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>However for partially-exposed PR (such as in grey-scale exposure), these ridges will clearly manifest as Y-oriented ridges of ~4-7% lower exposure dose, and reduced underexposed PR.</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>However for partially-exposed PR (such as in grey-scale exposure), these ridges will clearly manifest as Y-oriented ridges of ~4-7% lower exposure dose, and reduced underexposed PR.</div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>[[File:MLA150 - 160D0F15 stitching notch - 01.jpg|alt=SEM of horizontal/vertical 400nm line/space|none|thumb|MLA150 stitching example - ~500nm line/space in positive PR, showing 50nm bumps oriented in Y-direction due stitching.]]</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>[[File:MLA150 - 160D0F15 stitching notch - 01.jpg|alt=SEM of horizontal/vertical 400nm line/space|none|thumb|MLA150 stitching example - ~500nm line/space in positive PR, showing 50nm bumps oriented in Y-direction due stitching.]]</div></td>
</tr>
<tr>
<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><br />Overexposing the design can reduce the size of these stitching bumps. Since that will also alter your feature size on-wafer, you can us the ''Convert'' correction "CD Bias" to correct your feature sizes accordingly, see [[MLA150 - Design Guidelines#High-Resolution Writing|this page]] for more info on using that option.</div></td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><br />Overexposing the design can reduce the size of these stitching bumps. Since that will also alter your feature size on-wafer, you can us the ''Convert'' correction "CD Bias" to correct your feature sizes accordingly, see [[MLA150 - Design Guidelines#High-Resolution Writing|this page]] for more info on using that option<ins class="diffchange diffchange-inline">. Or just adjust your exposure CAD file feature sizes accordingly</ins>.</div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Stage not centered during [Substrate Load]==</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Stage not centered during [Substrate Load]==</div></td>
</tr>
</table>
John d
https://wiki.nanofab.ucsb.edu/w/index.php?title=MLA150_-_Troubleshooting&diff=161490&oldid=prev
John d: /* Stitching */ mention fix by overexposure + CD Bias
2023-11-02T22:47:17Z
<p><span dir="auto"><span class="autocomment">Stitching: </span> mention fix by overexposure + CD Bias</span></p>
<table class="diff diff-contentalign-left diff-editfont-monospace" data-mw="interface">
<col class="diff-marker" />
<col class="diff-content" />
<col class="diff-marker" />
<col class="diff-content" />
<tr class="diff-title" lang="en">
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 22:47, 2 November 2023</td>
</tr><tr>
<td colspan="2" class="diff-lineno">Line 68:</td>
<td colspan="2" class="diff-lineno">Line 68:</td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>However for partially-exposed PR (such as in grey-scale exposure), these ridges will clearly manifest as Y-oriented ridges of ~4-7% lower exposure dose, and reduced underexposed PR.</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>However for partially-exposed PR (such as in grey-scale exposure), these ridges will clearly manifest as Y-oriented ridges of ~4-7% lower exposure dose, and reduced underexposed PR.</div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>[[File:MLA150 - 160D0F15 stitching notch - 01.jpg|alt=SEM of horizontal/vertical 400nm line/space|none|thumb|MLA150 stitching example - ~500nm line/space in positive PR, showing 50nm bumps oriented in Y-direction due stitching.]]</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>[[File:MLA150 - 160D0F15 stitching notch - 01.jpg|alt=SEM of horizontal/vertical 400nm line/space|none|thumb|MLA150 stitching example - ~500nm line/space in positive PR, showing 50nm bumps oriented in Y-direction due stitching.]]</div></td>
</tr>
<tr>
<td colspan="2" class="diff-empty"> </td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><br />Overexposing the design can reduce the size of these stitching bumps. Since that will also alter your feature size on-wafer, you can us the ''Convert'' correction "CD Bias" to correct your feature sizes accordingly, see [[MLA150 - Design Guidelines#High-Resolution Writing|this page]] for more info on using that option.</div></td>
</tr>
<tr>
<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><br /></div></td>
<td colspan="2" class="diff-empty"> </td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Stage not centered during [Substrate Load]==</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Stage not centered during [Substrate Load]==</div></td>
</tr>
</table>
John d
https://wiki.nanofab.ucsb.edu/w/index.php?title=MLA150_-_Troubleshooting&diff=161489&oldid=prev
John d: /* Stitching */
2023-11-02T22:28:53Z
<p><span dir="auto"><span class="autocomment">Stitching</span></span></p>
<table class="diff diff-contentalign-left diff-editfont-monospace" data-mw="interface">
<col class="diff-marker" />
<col class="diff-content" />
<col class="diff-marker" />
<col class="diff-content" />
<tr class="diff-title" lang="en">
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 22:28, 2 November 2023</td>
</tr><tr>
<td colspan="2" class="diff-lineno">Line 67:</td>
<td colspan="2" class="diff-lineno">Line 67:</td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>However for partially-exposed PR (such as in grey-scale exposure), these ridges will clearly manifest as Y-oriented ridges of ~4-7% lower exposure dose, and reduced underexposed PR.</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>However for partially-exposed PR (such as in grey-scale exposure), these ridges will clearly manifest as Y-oriented ridges of ~4-7% lower exposure dose, and reduced underexposed PR.</div></td>
</tr>
<tr>
<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>[[File:MLA150 - 160D0F15 stitching notch - 01.jpg|alt=SEM of horizontal/vertical 400nm line/space|none|thumb|MLA150 stitching example - <del class="diffchange diffchange-inline">400nm</del> line/space in positive PR, showing 50nm bumps oriented in Y-direction due stitching.]]</div></td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>[[File:MLA150 - 160D0F15 stitching notch - 01.jpg|alt=SEM of horizontal/vertical 400nm line/space|none|thumb|MLA150 stitching example - <ins class="diffchange diffchange-inline">~500nm</ins> line/space in positive PR, showing 50nm bumps oriented in Y-direction due stitching.]]</div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div><br /></div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div><br /></div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
</table>
John d
https://wiki.nanofab.ucsb.edu/w/index.php?title=MLA150_-_Troubleshooting&diff=161488&oldid=prev
John d: /* Stitching */ added SEM of 400nm line/space with 50nm stitching bump
2023-11-02T22:28:11Z
<p><span dir="auto"><span class="autocomment">Stitching: </span> added SEM of 400nm line/space with 50nm stitching bump</span></p>
<table class="diff diff-contentalign-left diff-editfont-monospace" data-mw="interface">
<col class="diff-marker" />
<col class="diff-content" />
<col class="diff-marker" />
<col class="diff-content" />
<tr class="diff-title" lang="en">
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 22:28, 2 November 2023</td>
</tr><tr>
<td colspan="2" class="diff-lineno">Line 59:</td>
<td colspan="2" class="diff-lineno">Line 59:</td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**If you run into an unusual error, please let us know the Job Name, so that we can locate this log file if needed.</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**If you run into an unusual error, please let us know the Job Name, so that we can locate this log file if needed.</div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>==<del class="diffchange diffchange-inline"> </del>Stitching<del class="diffchange diffchange-inline"> </del>==</div></td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>==Stitching==</div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The system raster scans the ~12x20µm exposure fields across the wafer, and there will be stitching errors at the boundaries.</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The system raster scans the ~12x20µm exposure fields across the wafer, and there will be stitching errors at the boundaries.</div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td colspan="2" class="diff-lineno">Line 66:</td>
<td colspan="2" class="diff-lineno">Line 66:</td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>When you are fully-exposing your PR (typically with a bit of over-exposure, eg. ~20% overdose), these stitching boundaries are barely visible, if at all, and typically correspond to a ~50nm bump in the feature.</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>When you are fully-exposing your PR (typically with a bit of over-exposure, eg. ~20% overdose), these stitching boundaries are barely visible, if at all, and typically correspond to a ~50nm bump in the feature.</div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>However for partially-exposed PR (such as in grey-scale exposure), these ridges will clearly manifest as Y-oriented ridges of ~4-7% lower exposure dose, and reduced <del class="diffchange diffchange-inline">underexposer</del> PR.</div></td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>However for partially-exposed PR (such as in grey-scale exposure), these ridges will clearly manifest as Y-oriented ridges of ~4-7% lower exposure dose, and reduced <ins class="diffchange diffchange-inline">underexposed</ins> PR.</div></td>
</tr>
<tr>
<td colspan="2" class="diff-empty"> </td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>[[File:MLA150 - 160D0F15 stitching notch - 01.jpg|alt=SEM of horizontal/vertical 400nm line/space|none|thumb|MLA150 stitching example - 400nm line/space in positive PR, showing 50nm bumps oriented in Y-direction due stitching.]]</div></td>
</tr>
<tr>
<td colspan="2" class="diff-empty"> </td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><br /></div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Stage not centered during [Substrate Load]==</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Stage not centered during [Substrate Load]==</div></td>
</tr>
</table>
John d
https://wiki.nanofab.ucsb.edu/w/index.php?title=MLA150_-_Troubleshooting&diff=161486&oldid=prev
John d: stitching secviton on y-oriented ridges
2023-11-02T22:19:47Z
<p>stitching secviton on y-oriented ridges</p>
<table class="diff diff-contentalign-left diff-editfont-monospace" data-mw="interface">
<col class="diff-marker" />
<col class="diff-content" />
<col class="diff-marker" />
<col class="diff-content" />
<tr class="diff-title" lang="en">
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 22:19, 2 November 2023</td>
</tr><tr>
<td colspan="2" class="diff-lineno">Line 58:</td>
<td colspan="2" class="diff-lineno">Line 58:</td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**You can find a detailed log file of each exposure in the folder <code>C:\HIMT\LogFiles\ExposureLogs</code>. At the end of this file you can find final statistics from Field (Local) Alignment. You can copy the appropriate log file into your Nanofiles user folder to make it accessible via FTP.</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**You can find a detailed log file of each exposure in the folder <code>C:\HIMT\LogFiles\ExposureLogs</code>. At the end of this file you can find final statistics from Field (Local) Alignment. You can copy the appropriate log file into your Nanofiles user folder to make it accessible via FTP.</div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**If you run into an unusual error, please let us know the Job Name, so that we can locate this log file if needed.</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>**If you run into an unusual error, please let us know the Job Name, so that we can locate this log file if needed.</div></td>
</tr>
<tr>
<td colspan="2" class="diff-empty"> </td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td colspan="2" class="diff-empty"> </td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>== Stitching ==</div></td>
</tr>
<tr>
<td colspan="2" class="diff-empty"> </td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>The system raster scans the ~12x20µm exposure fields across the wafer, and there will be stitching errors at the boundaries.</div></td>
</tr>
<tr>
<td colspan="2" class="diff-empty"> </td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td colspan="2" class="diff-empty"> </td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>The "fast-scan" axis is in ±Y, which causes the largest stitching errors to show up as Y-oriented stripes, ridges or bumps, every ~20µm in X. We estimate that these ridges indicate about 4-7% lower dose at the stitching boundary.</div></td>
</tr>
<tr>
<td colspan="2" class="diff-empty"> </td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td colspan="2" class="diff-empty"> </td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>When you are fully-exposing your PR (typically with a bit of over-exposure, eg. ~20% overdose), these stitching boundaries are barely visible, if at all, and typically correspond to a ~50nm bump in the feature.</div></td>
</tr>
<tr>
<td colspan="2" class="diff-empty"> </td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td colspan="2" class="diff-empty"> </td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>However for partially-exposed PR (such as in grey-scale exposure), these ridges will clearly manifest as Y-oriented ridges of ~4-7% lower exposure dose, and reduced underexposer PR.</div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Stage not centered during [Substrate Load]==</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Stage not centered during [Substrate Load]==</div></td>
</tr>
</table>
John d
https://wiki.nanofab.ucsb.edu/w/index.php?title=MLA150_-_Troubleshooting&diff=161476&oldid=prev
John d: /* Greyscale Lithography Limitations */ moved content to Greyscale design guidelines page and linked to that.
2023-10-31T23:10:29Z
<p><span dir="auto"><span class="autocomment">Greyscale Lithography Limitations: </span> moved content to Greyscale design guidelines page and linked to that.</span></p>
<table class="diff diff-contentalign-left diff-editfont-monospace" data-mw="interface">
<col class="diff-marker" />
<col class="diff-content" />
<col class="diff-marker" />
<col class="diff-content" />
<tr class="diff-title" lang="en">
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 23:10, 31 October 2023</td>
</tr><tr>
<td colspan="2" class="diff-lineno">Line 128:</td>
<td colspan="2" class="diff-lineno">Line 128:</td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Greyscale Lithography Limitations==</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Greyscale Lithography Limitations==</div></td>
</tr>
<tr>
<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>The MLA150 does have grey-scale patterning capabilities, but has some limitations that we have identified.</div></td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>The MLA150 does have grey-scale patterning capabilities, but has some limitations that we have identified.<ins class="diffchange diffchange-inline"> Please see this page for the [[MLA150 - Design Guidelines#Limitations|Greyscale limitations and design guidelines.]]</ins></div></td>
</tr>
<tr>
<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"></td>
<td colspan="2" class="diff-empty"> </td>
</tr>
<tr>
<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>#No Rotational Alignment: the software does not have rotational alignment capabilities implemented for greyscale exposures. It can correct X/Y alignment, but you must ''DIS''able '''[_] ''Rotation''''' during exposure or the software will fail to expose (with no error).You can place the origin (0,0) of your CAD file using [Set Zero] anywhere on the sample, but it is unable to correct rotation (which requires the CAD file conversion to have rotation applied to it.). X-Y alignment has not been fully tested but we believe it will work.</div></td>
<td colspan="2" class="diff-empty"> </td>
</tr>
<tr>
<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>#Because our tool is the higher-throughput version that exposes a ~20µm field at a time (not a single spot), greyscale exposures will typically see the stitching boundaries between fields. The fast-scan axis is in Y, so you generally will see Y-oriented ridges with something like ~4-7% lower dose. This primarily manifests for greyscale because photoresist is being only partially exposed. (For regular binary exposure, users typically overexpose which hides this stitching.)</div></td>
<td colspan="2" class="diff-empty"> </td>
</tr>
<tr>
<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>#Your will need to sign up for significantly more time to run a greyscale exposure. The software requires an initial “conversion” of the CAD file - which takes 45-60min for a 100mm wafer with 50% fill. (Be patient - the progress bar may not indicate it is working, but it is!) Once that is complete the Design shows up in the list for exposure - you can expose it any time thereafter. The exposure is also much longer than binary: 50% fill on a 100mm wafer took 12 hours. (Small substrates should be much shorter.) Staff did these two steps on different days to accomplish the full litho.</div></td>
<td colspan="2" class="diff-empty"> </td>
</tr>
<tr>
<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>#You CAN perform focus-exposure matrices (“series”) with greyscale. We recommend to make a very small <<1mm region of your Greyscale CAD for FEM exposure.</div></td>
<td colspan="2" class="diff-empty"> </td>
</tr>
<tr>
<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>#In order to expose at low doses, you may need to enable the 15% filter in the exposure menu.</div></td>
<td colspan="2" class="diff-empty"> </td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Rebooting the Computer==</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Rebooting the Computer==</div></td>
</tr>
</table>
John d
https://wiki.nanofab.ucsb.edu/w/index.php?title=MLA150_-_Troubleshooting&diff=161236&oldid=prev
John d: /* Greyscale Lithography Limitations */ updated that X-Y alignment may work, just not rotation.
2023-08-09T16:56:19Z
<p><span dir="auto"><span class="autocomment">Greyscale Lithography Limitations: </span> updated that X-Y alignment may work, just not rotation.</span></p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 16:56, 9 August 2023</td>
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<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>#Proceed with exposure as normal (setting Dose/Defocus and [Expose]).</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>#Proceed with exposure as normal (setting Dose/Defocus and [Expose]).</div></td>
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<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>==<del class="diffchange diffchange-inline"> </del>Greyscale Lithography Limitations<del class="diffchange diffchange-inline"> </del>==</div></td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>==Greyscale Lithography Limitations==</div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The MLA150 does have grey-scale patterning capabilities, but has some limitations that we have identified.</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>The MLA150 does have grey-scale patterning capabilities, but has some limitations that we have identified.</div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>#<del class="diffchange diffchange-inline"> </del>No <del class="diffchange diffchange-inline">Alignments</del>: the software does not have alignment capabilities implemented for greyscale exposures. You can place the origin (0,0) of your CAD file using [Set Zero] anywhere on the sample, but it is unable to correct rotation (which requires the CAD file conversion to have rotation applied to it.) X-Y alignment <del class="diffchange diffchange-inline">might</del> <del class="diffchange diffchange-inline">be</del> <del class="diffchange diffchange-inline">possible</del> <del class="diffchange diffchange-inline">-</del> <del class="diffchange diffchange-inline">remains</del> <del class="diffchange diffchange-inline">to</del> <del class="diffchange diffchange-inline">be</del> <del class="diffchange diffchange-inline">tested</del> </div></td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>#No <ins class="diffchange diffchange-inline">Rotational Alignment</ins>: the software does not have<ins class="diffchange diffchange-inline"> rotational</ins> alignment capabilities implemented for greyscale exposures. <ins class="diffchange diffchange-inline">It can correct X/Y alignment, but you must ''DIS''able '''[_] ''Rotation''''' during exposure or the software will fail to expose (with no error).</ins>You can place the origin (0,0) of your CAD file using [Set Zero] anywhere on the sample, but it is unable to correct rotation (which requires the CAD file conversion to have rotation applied to it.)<ins class="diffchange diffchange-inline">. </ins> X-Y alignment <ins class="diffchange diffchange-inline">has</ins> <ins class="diffchange diffchange-inline">not</ins> <ins class="diffchange diffchange-inline">been</ins> <ins class="diffchange diffchange-inline">fully</ins> <ins class="diffchange diffchange-inline">tested</ins> <ins class="diffchange diffchange-inline">but</ins> <ins class="diffchange diffchange-inline">we</ins> <ins class="diffchange diffchange-inline">believe</ins> <ins class="diffchange diffchange-inline">it</ins> <ins class="diffchange diffchange-inline">will work.</ins></div></td>
</tr>
<tr>
<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>#<del class="diffchange diffchange-inline"> </del>Because our tool is the higher-throughput version that exposes a ~20µm field at a time (not a single spot), greyscale exposures will typically see the stitching boundaries between fields. The fast-scan axis is in Y, so you generally will see Y-oriented ridges with something like ~4-7% lower dose. This primarily manifests for greyscale because photoresist is being only partially exposed. (For regular binary exposure, users typically overexpose which hides this stitching.)</div></td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>#Because our tool is the higher-throughput version that exposes a ~20µm field at a time (not a single spot), greyscale exposures will typically see the stitching boundaries between fields. The fast-scan axis is in Y, so you generally will see Y-oriented ridges with something like ~4-7% lower dose. This primarily manifests for greyscale because photoresist is being only partially exposed. (For regular binary exposure, users typically overexpose which hides this stitching.)</div></td>
</tr>
<tr>
<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>#<del class="diffchange diffchange-inline"> </del>Your will need to sign up for significantly more time to run a greyscale exposure. The software requires an initial “conversion” of the CAD file - which takes 45-60min for a 100mm wafer with 50% fill. (Be patient - the progress bar may not indicate it is working, but it is!) Once that is complete the Design shows up in the list for exposure - you can expose it any time thereafter. The exposure is also much longer than binary: 50% fill on a 100mm wafer took 12 hours. (Small substrates should be much shorter.) Staff did these two steps on different days to accomplish the full litho.</div></td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>#Your will need to sign up for significantly more time to run a greyscale exposure. The software requires an initial “conversion” of the CAD file - which takes 45-60min for a 100mm wafer with 50% fill. (Be patient - the progress bar may not indicate it is working, but it is!) Once that is complete the Design shows up in the list for exposure - you can expose it any time thereafter. The exposure is also much longer than binary: 50% fill on a 100mm wafer took 12 hours. (Small substrates should be much shorter.) Staff did these two steps on different days to accomplish the full litho.</div></td>
</tr>
<tr>
<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>#<del class="diffchange diffchange-inline"> </del>You CAN perform focus-exposure matrices (“series”) with greyscale. We recommend to make a very small <<1mm region of your CAD for FEM exposure.</div></td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>#You CAN perform focus-exposure matrices (“series”) with greyscale. We recommend to make a very small <<1mm region of your<ins class="diffchange diffchange-inline"> Greyscale</ins> CAD for FEM exposure.</div></td>
</tr>
<tr>
<td class="diff-marker">−</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>#<del class="diffchange diffchange-inline"> </del>In order to expose at low doses, you may need to enable the 15% filter in the exposure menu.<del class="diffchange diffchange-inline"> </del></div></td>
<td class="diff-marker">+</td>
<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>#In order to expose at low doses, you may need to enable the 15% filter in the exposure menu.</div></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"></td>
</tr>
<tr>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Rebooting the Computer==</div></td>
<td class="diff-marker"> </td>
<td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Rebooting the Computer==</div></td>
</tr>
</table>
John d