Lithography Recipes
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General Information
This page contains information and links to recipes/datasheets spin-coated materials used in the facility.
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Photolithography Recipes
- R = Recipe is available. Clicking this link will take you to the recipe.
- A = Material is available for use, but no recipes are provided.
Photolithography Recipes
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| Contact Aligner Recipes | Stepper Recipes | Other | ||||
| Positive Resists | SUSS MJB-3 | SUSS MA-6 | Stepper 1 (GCA 6300) |
Stepper 2 (AutoStep 200) |
Stepper 3 (ASML DUV) |
MLA150 (Heidelberg) |
| AZ4110 | R | R | A | A | ||
| AZ4210 | R | R | A | A | ||
| AZ4330RS | R | R | A | A | ||
| AZ4620 | A | |||||
| OCG 825-35CS | A | A | A | A | ||
| SPR 950-0.8 | A | A | A | A | ||
| SPR 955 CM-0.9 | A | R | R | R | ||
| SPR 955 CM-1.8 | A | A | R | R | ||
| SPR 220-3.0 | R | R | R | R | ||
| SPR 220-7.0 | R | R | R | R | ||
| THMR-IP3600 HP D | A | A | A | |||
| UV6-0.8 | R | |||||
| UV210-0.3 | R | |||||
| UV26-2.5 | A | |||||
| Negative Resists | SUSS MJB-3 | SUSS MA-6 | Stepper 1 (GCA 6300) |
Stepper 2 (AutoStep 200) |
Stepper 3 (ASML DUV) |
MLA150 (Heidelberg) |
| AZ5214-EIR | R | R | R | R | ||
| AZnLOF 2020 | R | R | R | R | ||
| AZnLOF 2035 | A | A | A | A | ||
| AZnLOF 2070 | A | A | A | A | ||
| AZnLOF 5510 | A | A | R | R | ||
| UVN30-0.8 | R | |||||
| SU-8 2005,2010, 2015 | A | R | A | A | ||
| SU-8 2075 | A | A | A | A | ||
| NR9-1000,3000,6000PY | R | R | A | R | ||
| Anti-Reflection Coatings | SUSS MJB-3 | SUSS MA-6 | Stepper 1 (GCA 6300) |
Stepper 2 (AutoStep 200) |
Stepper 3 (ASML DUV) |
MLA150 (Heidelberg) |
| DUV42-P | R | |||||
| DS-K101-304 | R | |||||
| SUSS MJB-3 | SUSS MA-6 | Stepper 1 (GCA 6300) |
Stepper 2 (AutoStep 200) |
Stepper 3 (ASML DUV) |
MLA150 (Heidelberg) | |
E-Beam Lithography Recipes (JEOL JBX-6300FS)
- Under Development.
FIB Lithography Recipes (Raith Velion)
To Be Added
Automated Coat/Develop System Recipes (S-Cubed Flexi)
Recipes pre-loaded on the S-Cubed Flexi automated coat/bake/develop system. Only staff may write new recipes, contact the tool supervisor for more info.
To Be Added
Nanoimprinting Recipes
- Thermal Nanoimprint Process and Tutorial
- UV-Cure Low Temp, Low Pressure, Soft-Stamp Nanoimprint Process
Holography Recipes
- Standard Holography Process - on SiO2 on Si
- Holography Process Variations - Set-up Angle - Etching into SiO2 and Si
- Etch SiO2 Nano-structure - Changing Side-wall Angle - Etching into Si with a different line-width
- Reduce SiO2 Nanowire Diameter - Thermal Oxidation - Vapor HF Etching
Low-K Spin-On Dielectric Recipes
Lift-Off Techniques
- Lift-Off Description/Tutorial
- How it works, process limits and considerations for designing your process
- I-Line Lift-Off: Bi-Layer Process with PMGI Underlayer and Contact Aligner
- DUV Lift-Off: UV6 Imaging Resist + PMGI Underlayer
Chemicals Stocked + Datasheets
The following is a list of the lithography chemicals we stock in the lab, with links to the datasheets for each. The datasheets will often have important processing info such as spin-speed vs. thickness curves, typical process parameters, bake temps/times etc.