Difference between revisions of "Lithography Recipes"

Revision as of 17:47, 13 November 2012

R = Recipe is available. Clicking this link will take you to the recipe.

@@ Line 4: / Line 4: @@
 ==Chemical Datasheets==
+{|
-{{todo|Ask Brian where these should go...}}
+|-valign="top"
+|width=400|
 ;Positive Photoresists
 *{{fl|AXP4000pb-Datasheet.pdf|AZP4000 (AZ4110, AZ4210, AZ4330)}}
 *{{fl|OCG825-Positive-Resist-Datasheet.pdf|OCG825}}
-*{{fl|SPR220-Positive-Resist-Datasheet.pdf|SPR220 (SPR220-2, SPR220-7)}}
+*{{fl|SPR220-Positive-Resist-Datasheet.pdf|SPR220 (SPR220-3, SPR220-7)}}
 *{{fl|SPR950-Positive-Resist-Datasheet.pdf|SPR950-0.8}}
 *{{fl|SPR955-Positive-Resist-Datasheet.pdf|SPR955CM (SPR955CM-0.9, SPR955CM-1.8)}}
@@ Line 14: / Line 16: @@
 *{{fl|AZ5214-Negative-Resist-Datasheet.pdf|AZ5214}}
 *{{fl|AZnLOF5510-Negative-Resist-Datasheet.pdf|AZnLOF5510}}
-*{{fl|AZnLOF2020-Negative-Resist-Datasheet.pdf|AZnLOF2020}}
+*{{fl|AZnLOF2020-Negative-Resist-Datasheet.pdf|AZnLOF2000 (AZnLOF2020, AZnLOF2035, AZnLOF2070)}}
 ;Underlayers
 *{{fl|PMGI-Underlayer-Datasheet.pdf|PMGI (PMGI SF-11, PMGI SF-13, PMGI SF-15)}}
@@ Line 21: / Line 23: @@
 *{{fl|PMMA-E-Beam-Resist-Datasheet.pdf|PMMA (PMMA, P(MMA-MAA) copolymer)}}
 *{{fl|maN2403-E-Beam-Resist-Datasheet.pdf|maN 2403}}
+|
 ;Nanoimprinting
 *{{fl|NX1020-Nanoimprinting-Datasheet.pdf|NX1020}}
@@ Line 35: / Line 38: @@
 *{{fl|AZ300T-Resist-Remover.pdf|AZ300T}}
 *{{fl|PRX-127-Resist-Remover.pdf|PRX-127}}
+|}
 ==Recipes==